JPS61100626A - 振動式センサ - Google Patents

振動式センサ

Info

Publication number
JPS61100626A
JPS61100626A JP59223665A JP22366584A JPS61100626A JP S61100626 A JPS61100626 A JP S61100626A JP 59223665 A JP59223665 A JP 59223665A JP 22366584 A JP22366584 A JP 22366584A JP S61100626 A JPS61100626 A JP S61100626A
Authority
JP
Japan
Prior art keywords
vibration
type
vibrating
diffusion layer
vibrating beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59223665A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554705B2 (enrdf_load_stackoverflow
Inventor
Kyoichi Ikeda
恭一 池田
Katsumi Isozaki
克巳 磯崎
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP59223665A priority Critical patent/JPS61100626A/ja
Publication of JPS61100626A publication Critical patent/JPS61100626A/ja
Publication of JPH0554705B2 publication Critical patent/JPH0554705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/387—Devices controllable only by the variation of applied heat

Landscapes

  • Pressure Sensors (AREA)
JP59223665A 1984-10-24 1984-10-24 振動式センサ Granted JPS61100626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59223665A JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59223665A JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Publications (2)

Publication Number Publication Date
JPS61100626A true JPS61100626A (ja) 1986-05-19
JPH0554705B2 JPH0554705B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=16801728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59223665A Granted JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Country Status (1)

Country Link
JP (1) JPS61100626A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290050A (ja) * 1988-09-28 1990-03-29 Seiko Instr Inc 熱特性計測方法及び装置
US6878269B2 (en) 1996-01-31 2005-04-12 Kaneka Corporation Device for body fluid purification and system for body fluid purification
US8596121B2 (en) 2007-01-19 2013-12-03 Canon Kabushiki Kaisha Structural member having a plurality of conductive regions

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290050A (ja) * 1988-09-28 1990-03-29 Seiko Instr Inc 熱特性計測方法及び装置
US6878269B2 (en) 1996-01-31 2005-04-12 Kaneka Corporation Device for body fluid purification and system for body fluid purification
US8596121B2 (en) 2007-01-19 2013-12-03 Canon Kabushiki Kaisha Structural member having a plurality of conductive regions

Also Published As

Publication number Publication date
JPH0554705B2 (enrdf_load_stackoverflow) 1993-08-13

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