JPH0554259B2 - - Google Patents

Info

Publication number
JPH0554259B2
JPH0554259B2 JP58028121A JP2812183A JPH0554259B2 JP H0554259 B2 JPH0554259 B2 JP H0554259B2 JP 58028121 A JP58028121 A JP 58028121A JP 2812183 A JP2812183 A JP 2812183A JP H0554259 B2 JPH0554259 B2 JP H0554259B2
Authority
JP
Japan
Prior art keywords
layer
gaalas
phosphoric acid
oxide film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58028121A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59152632A (ja
Inventor
Masaru Wada
Kunio Ito
Takeshi Hamada
Juichi Shimizu
Fumiko Tajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58028121A priority Critical patent/JPS59152632A/ja
Publication of JPS59152632A publication Critical patent/JPS59152632A/ja
Publication of JPH0554259B2 publication Critical patent/JPH0554259B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP58028121A 1983-02-21 1983-02-21 半導体の表面浄化法 Granted JPS59152632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58028121A JPS59152632A (ja) 1983-02-21 1983-02-21 半導体の表面浄化法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58028121A JPS59152632A (ja) 1983-02-21 1983-02-21 半導体の表面浄化法

Publications (2)

Publication Number Publication Date
JPS59152632A JPS59152632A (ja) 1984-08-31
JPH0554259B2 true JPH0554259B2 (OSRAM) 1993-08-12

Family

ID=12239964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58028121A Granted JPS59152632A (ja) 1983-02-21 1983-02-21 半導体の表面浄化法

Country Status (1)

Country Link
JP (1) JPS59152632A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252140A (ja) * 1986-04-25 1987-11-02 Nippon Mining Co Ltd ＩｎＰウエ−ハの洗浄方法

Also Published As

Publication number Publication date
JPS59152632A (ja) 1984-08-31

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