JPH0553225B2 - - Google Patents
Info
- Publication number
- JPH0553225B2 JPH0553225B2 JP10308386A JP10308386A JPH0553225B2 JP H0553225 B2 JPH0553225 B2 JP H0553225B2 JP 10308386 A JP10308386 A JP 10308386A JP 10308386 A JP10308386 A JP 10308386A JP H0553225 B2 JPH0553225 B2 JP H0553225B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- detection head
- defect inspection
- robot
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 68
- 238000001514 detection method Methods 0.000 claims description 68
- 238000007689 inspection Methods 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 41
- 238000012937 correction Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Manipulator (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308386A JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10308386A JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62261040A JPS62261040A (ja) | 1987-11-13 |
| JPH0553225B2 true JPH0553225B2 (de) | 1993-08-09 |
Family
ID=14344739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10308386A Granted JPS62261040A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62261040A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0769150B2 (ja) * | 1989-05-15 | 1995-07-26 | 日産自動車株式会社 | 測定装置 |
| JPH0642914A (ja) * | 1992-07-24 | 1994-02-18 | Canon Inc | 変位測定装置 |
| DE102004007830B4 (de) * | 2004-02-18 | 2007-05-10 | Isra Vision Systems Ag | Verfahren zur Lokalisierung von Fehlstellen und Markiersystem |
| JP6857403B2 (ja) * | 2018-08-28 | 2021-04-14 | フロンティアシステム株式会社 | 管状体又は棒状体の検査装置 |
-
1986
- 1986-05-07 JP JP10308386A patent/JPS62261040A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62261040A (ja) | 1987-11-13 |
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