JPH0551173B2 - - Google Patents

Info

Publication number
JPH0551173B2
JPH0551173B2 JP61267601A JP26760186A JPH0551173B2 JP H0551173 B2 JPH0551173 B2 JP H0551173B2 JP 61267601 A JP61267601 A JP 61267601A JP 26760186 A JP26760186 A JP 26760186A JP H0551173 B2 JPH0551173 B2 JP H0551173B2
Authority
JP
Japan
Prior art keywords
discharge tube
microwave
plasma
microwaves
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61267601A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63122123A (ja
Inventor
Hironori Kawahara
Yoshinao Kawasaki
Makoto Nawata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP26760186A priority Critical patent/JPS63122123A/ja
Publication of JPS63122123A publication Critical patent/JPS63122123A/ja
Publication of JPH0551173B2 publication Critical patent/JPH0551173B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP26760186A 1986-11-12 1986-11-12 マイクロ波プラズマ処理装置 Granted JPS63122123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26760186A JPS63122123A (ja) 1986-11-12 1986-11-12 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26760186A JPS63122123A (ja) 1986-11-12 1986-11-12 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63122123A JPS63122123A (ja) 1988-05-26
JPH0551173B2 true JPH0551173B2 (cs) 1993-07-30

Family

ID=17446996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26760186A Granted JPS63122123A (ja) 1986-11-12 1986-11-12 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63122123A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612764B2 (ja) * 1987-07-08 1994-02-16 日電アネルバ株式会社 マイクロ波プラズマ処理装置
JPH0567586A (ja) * 1991-09-09 1993-03-19 Nec Corp Ｅｃｒプラズマエツチング装置
JPH06267910A (ja) * 1993-03-17 1994-09-22 Hitachi Ltd マイクロ波プラズマ処理装置
KR940023322A (ko) * 1993-03-17 1994-10-22 가나이 쯔도무 마이크로파 플라즈마 처리장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103340A (ja) * 1983-09-21 1984-06-14 Hitachi Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS63122123A (ja) 1988-05-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term