JPH0550092B2 - - Google Patents
Info
- Publication number
- JPH0550092B2 JPH0550092B2 JP58195047A JP19504783A JPH0550092B2 JP H0550092 B2 JPH0550092 B2 JP H0550092B2 JP 58195047 A JP58195047 A JP 58195047A JP 19504783 A JP19504783 A JP 19504783A JP H0550092 B2 JPH0550092 B2 JP H0550092B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- secondary electron
- stopper
- beam stopper
- vacuum duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001629 suppression Effects 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 description 14
- 239000002245 particle Substances 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910000833 kovar Inorganic materials 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58195047A JPS6086744A (ja) | 1983-10-17 | 1983-10-17 | ビ−ムストツパ−装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58195047A JPS6086744A (ja) | 1983-10-17 | 1983-10-17 | ビ−ムストツパ−装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6086744A JPS6086744A (ja) | 1985-05-16 |
| JPH0550092B2 true JPH0550092B2 (enrdf_load_stackoverflow) | 1993-07-28 |
Family
ID=16334658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58195047A Granted JPS6086744A (ja) | 1983-10-17 | 1983-10-17 | ビ−ムストツパ−装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6086744A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124700U (enrdf_load_stackoverflow) * | 1987-02-06 | 1988-08-15 | ||
| JP3668069B2 (ja) | 1999-09-21 | 2005-07-06 | 株式会社東芝 | 燃料電池用液体燃料収容容器および燃料電池 |
-
1983
- 1983-10-17 JP JP58195047A patent/JPS6086744A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6086744A (ja) | 1985-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |