JPS6086744A - ビ−ムストツパ−装置 - Google Patents

ビ−ムストツパ−装置

Info

Publication number
JPS6086744A
JPS6086744A JP58195047A JP19504783A JPS6086744A JP S6086744 A JPS6086744 A JP S6086744A JP 58195047 A JP58195047 A JP 58195047A JP 19504783 A JP19504783 A JP 19504783A JP S6086744 A JPS6086744 A JP S6086744A
Authority
JP
Japan
Prior art keywords
electrode
secondary electron
stopper
beam stopper
electron absorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58195047A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0550092B2 (enrdf_load_stackoverflow
Inventor
Osamu Sakamoto
修 坂本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISSHIN HAIBORUTEEJI KK
Nissin High Voltage Co Ltd
Original Assignee
NISSHIN HAIBORUTEEJI KK
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISSHIN HAIBORUTEEJI KK, Nissin High Voltage Co Ltd filed Critical NISSHIN HAIBORUTEEJI KK
Priority to JP58195047A priority Critical patent/JPS6086744A/ja
Publication of JPS6086744A publication Critical patent/JPS6086744A/ja
Publication of JPH0550092B2 publication Critical patent/JPH0550092B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58195047A 1983-10-17 1983-10-17 ビ−ムストツパ−装置 Granted JPS6086744A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58195047A JPS6086744A (ja) 1983-10-17 1983-10-17 ビ−ムストツパ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58195047A JPS6086744A (ja) 1983-10-17 1983-10-17 ビ−ムストツパ−装置

Publications (2)

Publication Number Publication Date
JPS6086744A true JPS6086744A (ja) 1985-05-16
JPH0550092B2 JPH0550092B2 (enrdf_load_stackoverflow) 1993-07-28

Family

ID=16334658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58195047A Granted JPS6086744A (ja) 1983-10-17 1983-10-17 ビ−ムストツパ−装置

Country Status (1)

Country Link
JP (1) JPS6086744A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124700U (enrdf_load_stackoverflow) * 1987-02-06 1988-08-15
US7147950B2 (en) 1999-09-21 2006-12-12 Kabushiki Kaisha Toshiba Liquid fuel-housing tank for fuel cell and fuel cell

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124700U (enrdf_load_stackoverflow) * 1987-02-06 1988-08-15
US7147950B2 (en) 1999-09-21 2006-12-12 Kabushiki Kaisha Toshiba Liquid fuel-housing tank for fuel cell and fuel cell

Also Published As

Publication number Publication date
JPH0550092B2 (enrdf_load_stackoverflow) 1993-07-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees