JPH0549826B2 - - Google Patents

Info

Publication number
JPH0549826B2
JPH0549826B2 JP8467303A JP6730384A JPH0549826B2 JP H0549826 B2 JPH0549826 B2 JP H0549826B2 JP 8467303 A JP8467303 A JP 8467303A JP 6730384 A JP6730384 A JP 6730384A JP H0549826 B2 JPH0549826 B2 JP H0549826B2
Authority
JP
Japan
Prior art keywords
stage
temperature
heat load
radiation shield
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8467303A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59218372A (ja
Inventor
Jei Iikobashii Maikuru
Ei Orusen Donarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23913381&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0549826(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of JPS59218372A publication Critical patent/JPS59218372A/ja
Publication of JPH0549826B2 publication Critical patent/JPH0549826B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP59067303A 1983-04-04 1984-04-04 低温ポンプならびにそのクロスオーバハングアップを阻止する方法 Granted JPS59218372A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48178383A 1983-04-04 1983-04-04
US481783 1983-04-04

Publications (2)

Publication Number Publication Date
JPS59218372A JPS59218372A (ja) 1984-12-08
JPH0549826B2 true JPH0549826B2 (enrdf_load_stackoverflow) 1993-07-27

Family

ID=23913381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59067303A Granted JPS59218372A (ja) 1983-04-04 1984-04-04 低温ポンプならびにそのクロスオーバハングアップを阻止する方法

Country Status (5)

Country Link
EP (1) EP0126909B1 (enrdf_load_stackoverflow)
JP (1) JPS59218372A (enrdf_load_stackoverflow)
CA (1) CA1220948A (enrdf_load_stackoverflow)
DE (1) DE3464948D1 (enrdf_load_stackoverflow)
IL (1) IL71403A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009250148A (ja) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd クライオポンプおよび冷凍機

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
WO1987002743A1 (en) * 1985-10-31 1987-05-07 Helix Technology Corporation Cryopump with quicker adsorption
EP0338113B1 (de) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas
EP3384212B1 (en) 2015-12-04 2019-04-17 Koninklijke Philips N.V. Cryogenic cooling system with temperature-dependent thermal shunt
CN118462540A (zh) * 2023-12-05 2024-08-09 上海优尊真空设备有限公司 一种方便控制的低温泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
JPS57176372A (en) * 1981-04-21 1982-10-29 Osaka Oxgen Ind Ltd Low temperature heat transmitter
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009250148A (ja) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd クライオポンプおよび冷凍機

Also Published As

Publication number Publication date
EP0126909A3 (en) 1985-01-23
JPS59218372A (ja) 1984-12-08
EP0126909B1 (en) 1987-07-22
IL71403A (en) 1991-01-31
DE3464948D1 (en) 1987-08-27
EP0126909A2 (en) 1984-12-05
IL71403A0 (en) 1984-06-29
CA1220948A (en) 1987-04-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term