EP0126909A3 - Cryopump with rapid cooldown and increased pressure stability - Google Patents

Cryopump with rapid cooldown and increased pressure stability Download PDF

Info

Publication number
EP0126909A3
EP0126909A3 EP84103732A EP84103732A EP0126909A3 EP 0126909 A3 EP0126909 A3 EP 0126909A3 EP 84103732 A EP84103732 A EP 84103732A EP 84103732 A EP84103732 A EP 84103732A EP 0126909 A3 EP0126909 A3 EP 0126909A3
Authority
EP
European Patent Office
Prior art keywords
cryopump
increased pressure
pressure stability
rapid cooldown
cooldown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP84103732A
Other versions
EP0126909B1 (en
EP0126909A2 (en
Inventor
Michael J. Eacobacci
Donald A. Olsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23913381&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0126909(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of EP0126909A2 publication Critical patent/EP0126909A2/en
Publication of EP0126909A3 publication Critical patent/EP0126909A3/en
Application granted granted Critical
Publication of EP0126909B1 publication Critical patent/EP0126909B1/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP84103732A 1983-04-04 1984-04-04 Cryopump with rapid cooldown and increased pressure stability Expired EP0126909B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48178383A 1983-04-04 1983-04-04
US481783 1983-04-04

Publications (3)

Publication Number Publication Date
EP0126909A2 EP0126909A2 (en) 1984-12-05
EP0126909A3 true EP0126909A3 (en) 1985-01-23
EP0126909B1 EP0126909B1 (en) 1987-07-22

Family

ID=23913381

Family Applications (1)

Application Number Title Priority Date Filing Date
EP84103732A Expired EP0126909B1 (en) 1983-04-04 1984-04-04 Cryopump with rapid cooldown and increased pressure stability

Country Status (5)

Country Link
EP (1) EP0126909B1 (en)
JP (1) JPS59218372A (en)
CA (1) CA1220948A (en)
DE (1) DE3464948D1 (en)
IL (1) IL71403A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
JPS63501585A (en) * 1985-10-31 1988-06-16 ヘリツクス　テクノロジ−　コ−ポレ−シヨン Rapid adsorption cryopump
EP0338113B1 (en) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Method for the adaptation of a 2-stage cryogenic pump to a specific gas
JP2009250148A (en) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd Cryopump and refrigerator
EP3384212B1 (en) 2015-12-04 2019-04-17 Koninklijke Philips N.V. Cryogenic cooling system with temperature-dependent thermal shunt
CN117489563A (en) * 2023-12-05 2024-02-02 上海优尊真空设备有限公司 Improved cryogenic pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2061391A (en) * 1979-10-18 1981-05-13 Varian Associates Cryogenic pumping apparatus with replaceable pumping surface elements
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
JPS57176372A (en) * 1981-04-21 1982-10-29 Osaka Oxgen Ind Ltd Low temperature heat transmitter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2061391A (en) * 1979-10-18 1981-05-13 Varian Associates Cryogenic pumping apparatus with replaceable pumping surface elements
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Also Published As

Publication number Publication date
CA1220948A (en) 1987-04-28
EP0126909B1 (en) 1987-07-22
IL71403A0 (en) 1984-06-29
IL71403A (en) 1991-01-31
EP0126909A2 (en) 1984-12-05
JPS59218372A (en) 1984-12-08
DE3464948D1 (en) 1987-08-27
JPH0549826B2 (en) 1993-07-27

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