CA1220948A - Cryopump with rapid cooldown and increased pressure stability - Google Patents
Cryopump with rapid cooldown and increased pressure stabilityInfo
- Publication number
- CA1220948A CA1220948A CA000451154A CA451154A CA1220948A CA 1220948 A CA1220948 A CA 1220948A CA 000451154 A CA000451154 A CA 000451154A CA 451154 A CA451154 A CA 451154A CA 1220948 A CA1220948 A CA 1220948A
- Authority
- CA
- Canada
- Prior art keywords
- stage
- cryopump
- radiation shield
- temperature
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 60
- 230000005855 radiation Effects 0.000 claims abstract description 57
- 239000007789 gas Substances 0.000 claims abstract description 35
- 229910052786 argon Inorganic materials 0.000 claims abstract description 30
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000001301 oxygen Substances 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- 238000005086 pumping Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 238000005057 refrigeration Methods 0.000 claims 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 238000009833 condensation Methods 0.000 abstract description 13
- 230000005494 condensation Effects 0.000 abstract description 13
- 238000009835 boiling Methods 0.000 description 7
- 239000003463 adsorbent Substances 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 238000010422 painting Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- HVTQDSGGHBWVTR-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-phenylmethoxypyrazol-1-yl]-1-morpholin-4-ylethanone Chemical compound C(C1=CC=CC=C1)OC1=NN(C=C1C=1C=NC(=NC=1)NC1CC2=CC=CC=C2C1)CC(=O)N1CCOCC1 HVTQDSGGHBWVTR-UHFFFAOYSA-N 0.000 description 1
- 241001052209 Cylinder Species 0.000 description 1
- 208000036366 Sensation of pressure Diseases 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000012321 sodium triacetoxyborohydride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002594 sorbent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48178383A | 1983-04-04 | 1983-04-04 | |
| US481,783 | 1983-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1220948A true CA1220948A (en) | 1987-04-28 |
Family
ID=23913381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000451154A Expired CA1220948A (en) | 1983-04-04 | 1984-04-03 | Cryopump with rapid cooldown and increased pressure stability |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0126909B1 (enrdf_load_stackoverflow) |
| JP (1) | JPS59218372A (enrdf_load_stackoverflow) |
| CA (1) | CA1220948A (enrdf_load_stackoverflow) |
| DE (1) | DE3464948D1 (enrdf_load_stackoverflow) |
| IL (1) | IL71403A (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
| WO1987002743A1 (en) * | 1985-10-31 | 1987-05-07 | Helix Technology Corporation | Cryopump with quicker adsorption |
| EP0338113B1 (de) * | 1988-04-22 | 1992-01-29 | Leybold Aktiengesellschaft | Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas |
| JP2009250148A (ja) * | 2008-04-08 | 2009-10-29 | Sumitomo Heavy Ind Ltd | クライオポンプおよび冷凍機 |
| EP3384212B1 (en) | 2015-12-04 | 2019-04-17 | Koninklijke Philips N.V. | Cryogenic cooling system with temperature-dependent thermal shunt |
| CN118462540A (zh) * | 2023-12-05 | 2024-08-09 | 上海优尊真空设备有限公司 | 一种方便控制的低温泵 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
| US4295338A (en) * | 1979-10-18 | 1981-10-20 | Varian Associates, Inc. | Cryogenic pumping apparatus with replaceable pumping surface elements |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| JPS57176372A (en) * | 1981-04-21 | 1982-10-29 | Osaka Oxgen Ind Ltd | Low temperature heat transmitter |
| US4356701A (en) * | 1981-05-22 | 1982-11-02 | Helix Technology Corporation | Cryopump |
-
1984
- 1984-03-29 IL IL71403A patent/IL71403A/xx not_active IP Right Cessation
- 1984-04-03 CA CA000451154A patent/CA1220948A/en not_active Expired
- 1984-04-04 JP JP59067303A patent/JPS59218372A/ja active Granted
- 1984-04-04 DE DE8484103732T patent/DE3464948D1/de not_active Expired
- 1984-04-04 EP EP84103732A patent/EP0126909B1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0126909A3 (en) | 1985-01-23 |
| JPS59218372A (ja) | 1984-12-08 |
| EP0126909B1 (en) | 1987-07-22 |
| IL71403A (en) | 1991-01-31 |
| DE3464948D1 (en) | 1987-08-27 |
| EP0126909A2 (en) | 1984-12-05 |
| IL71403A0 (en) | 1984-06-29 |
| JPH0549826B2 (enrdf_load_stackoverflow) | 1993-07-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |