CA1220948A - Cryopompe a refroidissement rapide et stabilite accrue sous pression - Google Patents

Cryopompe a refroidissement rapide et stabilite accrue sous pression

Info

Publication number
CA1220948A
CA1220948A CA000451154A CA451154A CA1220948A CA 1220948 A CA1220948 A CA 1220948A CA 000451154 A CA000451154 A CA 000451154A CA 451154 A CA451154 A CA 451154A CA 1220948 A CA1220948 A CA 1220948A
Authority
CA
Canada
Prior art keywords
stage
cryopump
radiation shield
temperature
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000451154A
Other languages
English (en)
Inventor
Michael J. Eacobacci
Donald A. Olsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23913381&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CA1220948(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of CA1220948A publication Critical patent/CA1220948A/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CA000451154A 1983-04-04 1984-04-03 Cryopompe a refroidissement rapide et stabilite accrue sous pression Expired CA1220948A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US48178383A 1983-04-04 1983-04-04
US481,783 1983-04-04

Publications (1)

Publication Number Publication Date
CA1220948A true CA1220948A (fr) 1987-04-28

Family

ID=23913381

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000451154A Expired CA1220948A (fr) 1983-04-04 1984-04-03 Cryopompe a refroidissement rapide et stabilite accrue sous pression

Country Status (5)

Country Link
EP (1) EP0126909B1 (fr)
JP (1) JPS59218372A (fr)
CA (1) CA1220948A (fr)
DE (1) DE3464948D1 (fr)
IL (1) IL71403A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
JPS63501585A (ja) * 1985-10-31 1988-06-16 ヘリツクス　テクノロジ−　コ−ポレ−シヨン 迅速吸着クライオポンプ
EP0338113B1 (fr) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Procédé pour adapter une cryopompe à deux étages à un gaz défini
JP2009250148A (ja) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd クライオポンプおよび冷凍機
EP3384212B1 (fr) 2015-12-04 2019-04-17 Koninklijke Philips N.V. Système de refroidissement cryogénique à dérivation thermique dépendant de la température
CN117489563A (zh) * 2023-12-05 2024-02-02 上海优尊真空设备有限公司 一种改进型低温泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
JPS57176372A (en) * 1981-04-21 1982-10-29 Osaka Oxgen Ind Ltd Low temperature heat transmitter
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Also Published As

Publication number Publication date
EP0126909B1 (fr) 1987-07-22
IL71403A0 (en) 1984-06-29
IL71403A (en) 1991-01-31
EP0126909A2 (fr) 1984-12-05
JPS59218372A (ja) 1984-12-08
DE3464948D1 (en) 1987-08-27
JPH0549826B2 (fr) 1993-07-27
EP0126909A3 (en) 1985-01-23

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Legal Events

Date Code Title Description
MKEX Expiry