DE3464948D1 - Cryopump with rapid cooldown and increased pressure stability - Google Patents

Cryopump with rapid cooldown and increased pressure stability

Info

Publication number
DE3464948D1
DE3464948D1 DE8484103732T DE3464948T DE3464948D1 DE 3464948 D1 DE3464948 D1 DE 3464948D1 DE 8484103732 T DE8484103732 T DE 8484103732T DE 3464948 T DE3464948 T DE 3464948T DE 3464948 D1 DE3464948 D1 DE 3464948D1
Authority
DE
Germany
Prior art keywords
cryopump
increased pressure
pressure stability
rapid cooldown
cooldown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484103732T
Other languages
German (de)
English (en)
Inventor
Michael J Eacobacci
Donald A Olsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23913381&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3464948(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of DE3464948D1 publication Critical patent/DE3464948D1/de
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8484103732T 1983-04-04 1984-04-04 Cryopump with rapid cooldown and increased pressure stability Expired DE3464948D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48178383A 1983-04-04 1983-04-04

Publications (1)

Publication Number Publication Date
DE3464948D1 true DE3464948D1 (en) 1987-08-27

Family

ID=23913381

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484103732T Expired DE3464948D1 (en) 1983-04-04 1984-04-04 Cryopump with rapid cooldown and increased pressure stability

Country Status (5)

Country Link
EP (1) EP0126909B1 (enrdf_load_stackoverflow)
JP (1) JPS59218372A (enrdf_load_stackoverflow)
CA (1) CA1220948A (enrdf_load_stackoverflow)
DE (1) DE3464948D1 (enrdf_load_stackoverflow)
IL (1) IL71403A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
DE3690558T1 (enrdf_load_stackoverflow) * 1985-10-31 1987-12-10
DE3868264D1 (de) * 1988-04-22 1992-03-12 Leybold Ag Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas.
JP2009250148A (ja) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd クライオポンプおよび冷凍機
CN112815563B (zh) 2015-12-04 2022-11-01 皇家飞利浦有限公司 具有依赖于温度的热分流器的低温冷却系统
CN118462540A (zh) * 2023-12-05 2024-08-09 上海优尊真空设备有限公司 一种方便控制的低温泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
JPS57176372A (en) * 1981-04-21 1982-10-29 Osaka Oxgen Ind Ltd Low temperature heat transmitter
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Also Published As

Publication number Publication date
CA1220948A (en) 1987-04-28
JPS59218372A (ja) 1984-12-08
EP0126909B1 (en) 1987-07-22
IL71403A0 (en) 1984-06-29
IL71403A (en) 1991-01-31
EP0126909A2 (en) 1984-12-05
EP0126909A3 (en) 1985-01-23
JPH0549826B2 (enrdf_load_stackoverflow) 1993-07-27

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings