JPH0548405B2 - - Google Patents

Info

Publication number
JPH0548405B2
JPH0548405B2 JP59206731A JP20673184A JPH0548405B2 JP H0548405 B2 JPH0548405 B2 JP H0548405B2 JP 59206731 A JP59206731 A JP 59206731A JP 20673184 A JP20673184 A JP 20673184A JP H0548405 B2 JPH0548405 B2 JP H0548405B2
Authority
JP
Japan
Prior art keywords
measurement object
scanning
radiation
radiation source
radiant energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59206731A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6184528A (ja
Inventor
Isao Hishikari
Tetsuo Kobari
Mitsuo Ishige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP59206731A priority Critical patent/JPS6184528A/ja
Publication of JPS6184528A publication Critical patent/JPS6184528A/ja
Publication of JPH0548405B2 publication Critical patent/JPH0548405B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/48—Thermography; Techniques using wholly visual means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
JP59206731A 1984-10-02 1984-10-02 温度測定装置 Granted JPS6184528A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59206731A JPS6184528A (ja) 1984-10-02 1984-10-02 温度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59206731A JPS6184528A (ja) 1984-10-02 1984-10-02 温度測定装置

Publications (2)

Publication Number Publication Date
JPS6184528A JPS6184528A (ja) 1986-04-30
JPH0548405B2 true JPH0548405B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-21

Family

ID=16528170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59206731A Granted JPS6184528A (ja) 1984-10-02 1984-10-02 温度測定装置

Country Status (1)

Country Link
JP (1) JPS6184528A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375525A (ja) * 1986-09-18 1988-04-05 Chino Corp 温度測定装置
JPS6375526A (ja) * 1986-09-18 1988-04-05 Chino Corp 温度測定装置
DE10119599A1 (de) * 2001-04-21 2002-10-31 Bosch Gmbh Robert Verfahren zur Bestimmung von Temperaturen an Halbleiterbauelementen

Also Published As

Publication number Publication date
JPS6184528A (ja) 1986-04-30

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