JPH054828B2 - - Google Patents

Info

Publication number
JPH054828B2
JPH054828B2 JP62219150A JP21915087A JPH054828B2 JP H054828 B2 JPH054828 B2 JP H054828B2 JP 62219150 A JP62219150 A JP 62219150A JP 21915087 A JP21915087 A JP 21915087A JP H054828 B2 JPH054828 B2 JP H054828B2
Authority
JP
Japan
Prior art keywords
barrier layer
film
tunnel barrier
tunnel
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62219150A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6464274A (en
Inventor
Shinya Kominami
Yoshinobu Taruya
Ushio Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62219150A priority Critical patent/JPS6464274A/ja
Publication of JPS6464274A publication Critical patent/JPS6464274A/ja
Publication of JPH054828B2 publication Critical patent/JPH054828B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62219150A 1987-09-03 1987-09-03 Tunnel type josephson junction Granted JPS6464274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62219150A JPS6464274A (en) 1987-09-03 1987-09-03 Tunnel type josephson junction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62219150A JPS6464274A (en) 1987-09-03 1987-09-03 Tunnel type josephson junction

Publications (2)

Publication Number Publication Date
JPS6464274A JPS6464274A (en) 1989-03-10
JPH054828B2 true JPH054828B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-20

Family

ID=16730990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62219150A Granted JPS6464274A (en) 1987-09-03 1987-09-03 Tunnel type josephson junction

Country Status (1)

Country Link
JP (1) JPS6464274A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9653398B1 (en) * 2015-12-08 2017-05-16 Northrop Grumman Systems Corporation Non-oxide based dielectrics for superconductor devices
US10608159B2 (en) 2016-11-15 2020-03-31 Northrop Grumman Systems Corporation Method of making a superconductor device
US10763419B2 (en) 2017-06-02 2020-09-01 Northrop Grumman Systems Corporation Deposition methodology for superconductor interconnects
US10985059B2 (en) 2018-11-01 2021-04-20 Northrop Grumman Systems Corporation Preclean and dielectric deposition methodology for superconductor interconnect fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582082A (ja) * 1981-06-29 1983-01-07 Nec Corp ジヨセフソン接合素子
JPS6448315A (en) * 1987-08-14 1989-02-22 Hitachi Metals Ltd High temperature superconductor

Also Published As

Publication number Publication date
JPS6464274A (en) 1989-03-10

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Legal Events

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