JPH0547467Y2 - - Google Patents
Info
- Publication number
- JPH0547467Y2 JPH0547467Y2 JP6495587U JP6495587U JPH0547467Y2 JP H0547467 Y2 JPH0547467 Y2 JP H0547467Y2 JP 6495587 U JP6495587 U JP 6495587U JP 6495587 U JP6495587 U JP 6495587U JP H0547467 Y2 JPH0547467 Y2 JP H0547467Y2
- Authority
- JP
- Japan
- Prior art keywords
- hand
- robot arm
- arm
- wafer
- capture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 63
- 230000007246 mechanism Effects 0.000 claims description 52
- 238000003860 storage Methods 0.000 claims description 25
- 238000001514 detection method Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 7
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000630 rising effect Effects 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6495587U JPH0547467Y2 (cg-RX-API-DMAC7.html) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6495587U JPH0547467Y2 (cg-RX-API-DMAC7.html) | 1987-04-28 | 1987-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63172130U JPS63172130U (cg-RX-API-DMAC7.html) | 1988-11-09 |
| JPH0547467Y2 true JPH0547467Y2 (cg-RX-API-DMAC7.html) | 1993-12-14 |
Family
ID=30901585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6495587U Expired - Lifetime JPH0547467Y2 (cg-RX-API-DMAC7.html) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0547467Y2 (cg-RX-API-DMAC7.html) |
-
1987
- 1987-04-28 JP JP6495587U patent/JPH0547467Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63172130U (cg-RX-API-DMAC7.html) | 1988-11-09 |
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