JPH0546982B2 - - Google Patents
Info
- Publication number
- JPH0546982B2 JPH0546982B2 JP61219373A JP21937386A JPH0546982B2 JP H0546982 B2 JPH0546982 B2 JP H0546982B2 JP 61219373 A JP61219373 A JP 61219373A JP 21937386 A JP21937386 A JP 21937386A JP H0546982 B2 JPH0546982 B2 JP H0546982B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage
- wafers
- carrier
- carriers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000969 carrier Substances 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 62
- 238000011109 contamination Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000012050 conventional carrier Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219373A JPS6376449A (ja) | 1986-09-19 | 1986-09-19 | ウエハキヤリヤ治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61219373A JPS6376449A (ja) | 1986-09-19 | 1986-09-19 | ウエハキヤリヤ治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6376449A JPS6376449A (ja) | 1988-04-06 |
| JPH0546982B2 true JPH0546982B2 (enrdf_load_stackoverflow) | 1993-07-15 |
Family
ID=16734398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61219373A Granted JPS6376449A (ja) | 1986-09-19 | 1986-09-19 | ウエハキヤリヤ治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6376449A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN213532672U (zh) * | 2021-03-19 | 2021-06-25 | 台湾积体电路制造股份有限公司 | 定位治具 |
-
1986
- 1986-09-19 JP JP61219373A patent/JPS6376449A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6376449A (ja) | 1988-04-06 |
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