JPH054602B2 - - Google Patents
Info
- Publication number
- JPH054602B2 JPH054602B2 JP8925487A JP8925487A JPH054602B2 JP H054602 B2 JPH054602 B2 JP H054602B2 JP 8925487 A JP8925487 A JP 8925487A JP 8925487 A JP8925487 A JP 8925487A JP H054602 B2 JPH054602 B2 JP H054602B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- position detection
- electrodes
- receiving surface
- detection element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 50
- 239000004065 semiconductor Substances 0.000 claims description 11
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- -1 polycrystal Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62089254A JPS63253203A (ja) | 1987-04-10 | 1987-04-10 | 位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62089254A JPS63253203A (ja) | 1987-04-10 | 1987-04-10 | 位置検出装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4232994A Division JP2814909B2 (ja) | 1994-03-14 | 1994-03-14 | 位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63253203A JPS63253203A (ja) | 1988-10-20 |
| JPH054602B2 true JPH054602B2 (zh) | 1993-01-20 |
Family
ID=13965626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62089254A Granted JPS63253203A (ja) | 1987-04-10 | 1987-04-10 | 位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63253203A (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228103A (ja) * | 1983-06-09 | 1984-12-21 | Sony Corp | 変位量検出装置 |
-
1987
- 1987-04-10 JP JP62089254A patent/JPS63253203A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228103A (ja) * | 1983-06-09 | 1984-12-21 | Sony Corp | 変位量検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63253203A (ja) | 1988-10-20 |
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