JPH0545166B2 - - Google Patents

Info

Publication number
JPH0545166B2
JPH0545166B2 JP61145088A JP14508886A JPH0545166B2 JP H0545166 B2 JPH0545166 B2 JP H0545166B2 JP 61145088 A JP61145088 A JP 61145088A JP 14508886 A JP14508886 A JP 14508886A JP H0545166 B2 JPH0545166 B2 JP H0545166B2
Authority
JP
Japan
Prior art keywords
tapered
substrate
resistor
sensor
film resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61145088A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631924A (ja
Inventor
Hirotane Ikeda
Minoru Oota
Kazuhiko Miura
Masatoshi Onoda
Tadashi Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP61145088A priority Critical patent/JPS631924A/ja
Publication of JPS631924A publication Critical patent/JPS631924A/ja
Publication of JPH0545166B2 publication Critical patent/JPH0545166B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP61145088A 1986-06-20 1986-06-20 直熱型流量センサの製造方法 Granted JPS631924A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61145088A JPS631924A (ja) 1986-06-20 1986-06-20 直熱型流量センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61145088A JPS631924A (ja) 1986-06-20 1986-06-20 直熱型流量センサの製造方法

Publications (2)

Publication Number Publication Date
JPS631924A JPS631924A (ja) 1988-01-06
JPH0545166B2 true JPH0545166B2 (enExample) 1993-07-08

Family

ID=15377103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61145088A Granted JPS631924A (ja) 1986-06-20 1986-06-20 直熱型流量センサの製造方法

Country Status (1)

Country Link
JP (1) JPS631924A (enExample)

Also Published As

Publication number Publication date
JPS631924A (ja) 1988-01-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees