JPH0544726Y2 - - Google Patents

Info

Publication number
JPH0544726Y2
JPH0544726Y2 JP1985070403U JP7040385U JPH0544726Y2 JP H0544726 Y2 JPH0544726 Y2 JP H0544726Y2 JP 1985070403 U JP1985070403 U JP 1985070403U JP 7040385 U JP7040385 U JP 7040385U JP H0544726 Y2 JPH0544726 Y2 JP H0544726Y2
Authority
JP
Japan
Prior art keywords
axis
scanning device
plane
measured
curved surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985070403U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61187410U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985070403U priority Critical patent/JPH0544726Y2/ja
Publication of JPS61187410U publication Critical patent/JPS61187410U/ja
Application granted granted Critical
Publication of JPH0544726Y2 publication Critical patent/JPH0544726Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1985070403U 1985-05-13 1985-05-13 Expired - Lifetime JPH0544726Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enEXAMPLES) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985070403U JPH0544726Y2 (enEXAMPLES) 1985-05-13 1985-05-13

Publications (2)

Publication Number Publication Date
JPS61187410U JPS61187410U (enEXAMPLES) 1986-11-21
JPH0544726Y2 true JPH0544726Y2 (enEXAMPLES) 1993-11-15

Family

ID=30606951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985070403U Expired - Lifetime JPH0544726Y2 (enEXAMPLES) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPH0544726Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5121199B2 (ja) * 2006-09-25 2013-01-16 オリンパス株式会社 基板検査装置および基板検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS431095Y1 (enEXAMPLES) * 1966-04-11 1968-01-19
JPS5890101A (ja) * 1981-11-25 1983-05-28 Mitsutoyo Mfg Co Ltd 三次元測定機

Also Published As

Publication number Publication date
JPS61187410U (enEXAMPLES) 1986-11-21

Similar Documents

Publication Publication Date Title
US4627009A (en) Microscope stage assembly and control system
US8612173B2 (en) Six axis motion control apparatus
US5124524A (en) Laser alignment and control system
US5011282A (en) Laser beam path alignment apparatus for laser processing machines
US5251156A (en) Method and apparatus for non-contact measurement of object surfaces
KR101110145B1 (ko) Ｘ선 투시 장치
US20120194651A1 (en) Shape measuring apparatus
KR20040038674A (ko) 엑스레이 형광투시 장치
CN108871234A (zh) 非接触式三维自动化扫描测试系统
JPH03150405A (ja) 物体の輪郭測定方法及び装置
JPH0544726Y2 (enEXAMPLES)
JP3293830B2 (ja) 物体の幾何学パラメータを測定および計算する装置および方法
JP2007219011A (ja) マスクレス露光装置及びその露光方法
JPH0755439A (ja) 三次元形状計測装置
JP3064184B2 (ja) 形状測定機
JP2902608B2 (ja) 三次元測定方法
JPH0675617A (ja) カメラ視点変更方式
JPH10216981A (ja) 光軸移動型レーザー加工装置
JPH1123751A (ja) ＸＹθステージおよびＸＹθステージの制御装置
JP2003233424A (ja) Ｘｙステージの位置補正方法、装置、及び、これを用いた位置決め方法、装置
JPH041453Y2 (enEXAMPLES)
JPH07107597B2 (ja) 移動物標投射装置
JP3516028B2 (ja) 蛍光ｘ線分析方法および装置
JPS61173877A (ja) 三次元位置設定補助装置
JPH054180A (ja) ハンドアイ付き多軸ロボツトの座標系整合方法