JPH0544617B2 - - Google Patents
Info
- Publication number
- JPH0544617B2 JPH0544617B2 JP59040867A JP4086784A JPH0544617B2 JP H0544617 B2 JPH0544617 B2 JP H0544617B2 JP 59040867 A JP59040867 A JP 59040867A JP 4086784 A JP4086784 A JP 4086784A JP H0544617 B2 JPH0544617 B2 JP H0544617B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- chamber
- diaphragm
- differential pressure
- pressure side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 47
- 238000002955 isolation Methods 0.000 claims description 28
- 230000013011 mating Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 13
- 230000000295 complement effect Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 description 19
- 238000003466 welding Methods 0.000 description 12
- 238000009530 blood pressure measurement Methods 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 9
- 229920002545 silicone oil Polymers 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000035939 shock Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086784A JPS60185130A (ja) | 1984-03-02 | 1984-03-02 | 半導体差圧発信器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086784A JPS60185130A (ja) | 1984-03-02 | 1984-03-02 | 半導体差圧発信器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60185130A JPS60185130A (ja) | 1985-09-20 |
| JPH0544617B2 true JPH0544617B2 (de) | 1993-07-06 |
Family
ID=12592471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4086784A Granted JPS60185130A (ja) | 1984-03-02 | 1984-03-02 | 半導体差圧発信器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60185130A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05296867A (ja) * | 1992-04-23 | 1993-11-12 | Hitachi Ltd | 差圧伝送器 |
| US5621175A (en) * | 1992-10-22 | 1997-04-15 | Hitachi, Ltd. | Differential pressure transmitter having symmetrical construction |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322483A (en) * | 1976-03-24 | 1978-03-01 | Ict Instruments | Transducer assembly for differential pressure measurement |
| JPS58142238A (ja) * | 1982-02-18 | 1983-08-24 | Yokogawa Hokushin Electric Corp | 差圧測定装置 |
| JPS58160327A (ja) * | 1982-03-17 | 1983-09-22 | Jiyuuzen Kagaku Kk | 水性樹脂エマルジヨンの安定剤およびこれを用いたエマルジヨンの安定化法 |
| JPS5999230A (ja) * | 1982-11-29 | 1984-06-07 | Toshiba Corp | 差圧伝送器 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5892643U (ja) * | 1981-12-18 | 1983-06-23 | 株式会社日立製作所 | 差圧電送器用の固定ダンパ |
| JPS58160327U (ja) * | 1982-04-20 | 1983-10-25 | 株式会社東芝 | 差圧検出装置 |
| JPS58175434U (ja) * | 1983-03-24 | 1983-11-24 | 株式会社東芝 | 差圧検出装置 |
-
1984
- 1984-03-02 JP JP4086784A patent/JPS60185130A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322483A (en) * | 1976-03-24 | 1978-03-01 | Ict Instruments | Transducer assembly for differential pressure measurement |
| JPS58142238A (ja) * | 1982-02-18 | 1983-08-24 | Yokogawa Hokushin Electric Corp | 差圧測定装置 |
| JPS58160327A (ja) * | 1982-03-17 | 1983-09-22 | Jiyuuzen Kagaku Kk | 水性樹脂エマルジヨンの安定剤およびこれを用いたエマルジヨンの安定化法 |
| JPS5999230A (ja) * | 1982-11-29 | 1984-06-07 | Toshiba Corp | 差圧伝送器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60185130A (ja) | 1985-09-20 |
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