JPH0543470Y2 - - Google Patents

Info

Publication number
JPH0543470Y2
JPH0543470Y2 JP1985008990U JP899085U JPH0543470Y2 JP H0543470 Y2 JPH0543470 Y2 JP H0543470Y2 JP 1985008990 U JP1985008990 U JP 1985008990U JP 899085 U JP899085 U JP 899085U JP H0543470 Y2 JPH0543470 Y2 JP H0543470Y2
Authority
JP
Japan
Prior art keywords
holder
charged particle
particle beam
linear
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985008990U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61125043U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985008990U priority Critical patent/JPH0543470Y2/ja
Publication of JPS61125043U publication Critical patent/JPS61125043U/ja
Application granted granted Critical
Publication of JPH0543470Y2 publication Critical patent/JPH0543470Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP1985008990U 1985-01-25 1985-01-25 Expired - Lifetime JPH0543470Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enrdf_load_stackoverflow) 1985-01-25 1985-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985008990U JPH0543470Y2 (enrdf_load_stackoverflow) 1985-01-25 1985-01-25

Publications (2)

Publication Number Publication Date
JPS61125043U JPS61125043U (enrdf_load_stackoverflow) 1986-08-06
JPH0543470Y2 true JPH0543470Y2 (enrdf_load_stackoverflow) 1993-11-02

Family

ID=30488782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985008990U Expired - Lifetime JPH0543470Y2 (enrdf_load_stackoverflow) 1985-01-25 1985-01-25

Country Status (1)

Country Link
JP (1) JPH0543470Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921020A (ja) * 1982-07-27 1984-02-02 Nippon Telegr & Teleph Corp <Ntt> 荷電ビ−ム露光装置用成形絞り

Also Published As

Publication number Publication date
JPS61125043U (enrdf_load_stackoverflow) 1986-08-06

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