JPH0543107Y2 - - Google Patents
Info
- Publication number
- JPH0543107Y2 JPH0543107Y2 JP1988089526U JP8952688U JPH0543107Y2 JP H0543107 Y2 JPH0543107 Y2 JP H0543107Y2 JP 1988089526 U JP1988089526 U JP 1988089526U JP 8952688 U JP8952688 U JP 8952688U JP H0543107 Y2 JPH0543107 Y2 JP H0543107Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- crucible
- melt
- single crystal
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988089526U JPH0543107Y2 (en, 2012) | 1988-07-07 | 1988-07-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988089526U JPH0543107Y2 (en, 2012) | 1988-07-07 | 1988-07-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0211166U JPH0211166U (en, 2012) | 1990-01-24 |
JPH0543107Y2 true JPH0543107Y2 (en, 2012) | 1993-10-29 |
Family
ID=31314075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988089526U Expired - Lifetime JPH0543107Y2 (en, 2012) | 1988-07-07 | 1988-07-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0543107Y2 (en, 2012) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5690285U (en, 2012) * | 1980-09-26 | 1981-07-18 | ||
JP2589212B2 (ja) * | 1990-10-17 | 1997-03-12 | コマツ電子金属株式会社 | 半導体単結晶製造装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1261715A (en) * | 1984-07-06 | 1989-09-26 | General Signal Corporation | Apparatus and process for growing monocrystals of semiconductor materials from shallow crucibles by czochralski technique |
JPS6126592A (ja) * | 1984-07-18 | 1986-02-05 | Fujitsu Ltd | 結晶成長装置 |
-
1988
- 1988-07-07 JP JP1988089526U patent/JPH0543107Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0211166U (en, 2012) | 1990-01-24 |
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