JPH0542977Y2 - - Google Patents

Info

Publication number
JPH0542977Y2
JPH0542977Y2 JP1985089623U JP8962385U JPH0542977Y2 JP H0542977 Y2 JPH0542977 Y2 JP H0542977Y2 JP 1985089623 U JP1985089623 U JP 1985089623U JP 8962385 U JP8962385 U JP 8962385U JP H0542977 Y2 JPH0542977 Y2 JP H0542977Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck
receiving surface
guide
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985089623U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61206537U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985089623U priority Critical patent/JPH0542977Y2/ja
Publication of JPS61206537U publication Critical patent/JPS61206537U/ja
Application granted granted Critical
Publication of JPH0542977Y2 publication Critical patent/JPH0542977Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1985089623U 1985-06-14 1985-06-14 Expired - Lifetime JPH0542977Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985089623U JPH0542977Y2 (en:Method) 1985-06-14 1985-06-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985089623U JPH0542977Y2 (en:Method) 1985-06-14 1985-06-14

Publications (2)

Publication Number Publication Date
JPS61206537U JPS61206537U (en:Method) 1986-12-26
JPH0542977Y2 true JPH0542977Y2 (en:Method) 1993-10-28

Family

ID=30643874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985089623U Expired - Lifetime JPH0542977Y2 (en:Method) 1985-06-14 1985-06-14

Country Status (1)

Country Link
JP (1) JPH0542977Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6298364B2 (ja) * 2014-06-09 2018-03-20 株式会社ディスコ 加工装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338291Y2 (en:Method) * 1973-08-14 1978-09-16
JPS6018310Y2 (ja) * 1980-01-21 1985-06-03 シ−ケ−デイ株式会社 半軟質シ−ト用保持装置

Also Published As

Publication number Publication date
JPS61206537U (en:Method) 1986-12-26

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