JPH0542610B2 - - Google Patents
Info
- Publication number
- JPH0542610B2 JPH0542610B2 JP59058772A JP5877284A JPH0542610B2 JP H0542610 B2 JPH0542610 B2 JP H0542610B2 JP 59058772 A JP59058772 A JP 59058772A JP 5877284 A JP5877284 A JP 5877284A JP H0542610 B2 JPH0542610 B2 JP H0542610B2
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- diaphragm
- pressure
- resistance
- temperature coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877284A JPS60201229A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5877284A JPS60201229A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201229A JPS60201229A (ja) | 1985-10-11 |
| JPH0542610B2 true JPH0542610B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-06-29 |
Family
ID=13093836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5877284A Granted JPS60201229A (ja) | 1984-03-27 | 1984-03-27 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201229A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0476956A (ja) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | 半導体加速度センサの製造方法 |
| JPH0476959A (ja) * | 1990-07-19 | 1992-03-11 | Mitsubishi Electric Corp | 半導体圧力センサの製造方法 |
| JP5658477B2 (ja) * | 2010-04-13 | 2015-01-28 | アズビル株式会社 | 圧力センサ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55106331A (en) * | 1979-02-09 | 1980-08-15 | Hitachi Ltd | Pressure sensor of semiconductor strain gauge |
| JPS5737235A (en) * | 1980-08-19 | 1982-03-01 | Omron Tateisi Electronics Co | Semiconductor pressure-sensitive device |
| JPS5782730A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Pressure sensor |
| JPS5826237A (ja) * | 1981-08-07 | 1983-02-16 | Mitsubishi Electric Corp | 圧力センサ |
-
1984
- 1984-03-27 JP JP5877284A patent/JPS60201229A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60201229A (ja) | 1985-10-11 |