JPH0542607B2 - - Google Patents
Info
- Publication number
- JPH0542607B2 JPH0542607B2 JP59057963A JP5796384A JPH0542607B2 JP H0542607 B2 JPH0542607 B2 JP H0542607B2 JP 59057963 A JP59057963 A JP 59057963A JP 5796384 A JP5796384 A JP 5796384A JP H0542607 B2 JPH0542607 B2 JP H0542607B2
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- gauge
- pressure
- temperature
- coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5796384A JPS60201227A (ja) | 1984-03-26 | 1984-03-26 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5796384A JPS60201227A (ja) | 1984-03-26 | 1984-03-26 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201227A JPS60201227A (ja) | 1985-10-11 |
| JPH0542607B2 true JPH0542607B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-06-29 |
Family
ID=13070662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5796384A Granted JPS60201227A (ja) | 1984-03-26 | 1984-03-26 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201227A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55106331A (en) * | 1979-02-09 | 1980-08-15 | Hitachi Ltd | Pressure sensor of semiconductor strain gauge |
| JPS5941134B2 (ja) * | 1980-04-15 | 1984-10-04 | 富士電機株式会社 | 圧力変換器 |
| JPS5782730A (en) * | 1980-11-10 | 1982-05-24 | Mitsubishi Electric Corp | Pressure sensor |
| JPS5826237A (ja) * | 1981-08-07 | 1983-02-16 | Mitsubishi Electric Corp | 圧力センサ |
-
1984
- 1984-03-26 JP JP5796384A patent/JPS60201227A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60201227A (ja) | 1985-10-11 |