JPH0542398B2 - - Google Patents

Info

Publication number
JPH0542398B2
JPH0542398B2 JP61120587A JP12058786A JPH0542398B2 JP H0542398 B2 JPH0542398 B2 JP H0542398B2 JP 61120587 A JP61120587 A JP 61120587A JP 12058786 A JP12058786 A JP 12058786A JP H0542398 B2 JPH0542398 B2 JP H0542398B2
Authority
JP
Japan
Prior art keywords
gas
diamond
phase synthesis
reaction chamber
crystalline carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61120587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62278193A (ja
Inventor
Koji Kobashi
Kozo Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP12058786A priority Critical patent/JPS62278193A/ja
Publication of JPS62278193A publication Critical patent/JPS62278193A/ja
Publication of JPH0542398B2 publication Critical patent/JPH0542398B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP12058786A 1986-05-26 1986-05-26 結晶性炭素の気相合成法 Granted JPS62278193A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12058786A JPS62278193A (ja) 1986-05-26 1986-05-26 結晶性炭素の気相合成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12058786A JPS62278193A (ja) 1986-05-26 1986-05-26 結晶性炭素の気相合成法

Publications (2)

Publication Number Publication Date
JPS62278193A JPS62278193A (ja) 1987-12-03
JPH0542398B2 true JPH0542398B2 (enrdf_load_stackoverflow) 1993-06-28

Family

ID=14789964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12058786A Granted JPS62278193A (ja) 1986-05-26 1986-05-26 結晶性炭素の気相合成法

Country Status (1)

Country Link
JP (1) JPS62278193A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5071677A (en) * 1990-05-24 1991-12-10 Houston Advanced Research Center Halogen-assisted chemical vapor deposition of diamond

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930709A (ja) * 1982-08-13 1984-02-18 Toa Nenryo Kogyo Kk 炭素膜及び／又は炭素粒子の製造方法
JPS61222915A (ja) * 1985-03-29 1986-10-03 Asahi Chem Ind Co Ltd ダイヤモンドの気相合成方法

Also Published As

Publication number Publication date
JPS62278193A (ja) 1987-12-03

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