JPH0542105B2 - - Google Patents
Info
- Publication number
- JPH0542105B2 JPH0542105B2 JP61062713A JP6271386A JPH0542105B2 JP H0542105 B2 JPH0542105 B2 JP H0542105B2 JP 61062713 A JP61062713 A JP 61062713A JP 6271386 A JP6271386 A JP 6271386A JP H0542105 B2 JPH0542105 B2 JP H0542105B2
- Authority
- JP
- Japan
- Prior art keywords
- introduction
- laser
- sample
- laser beam
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 claims description 54
- 230000007935 neutral effect Effects 0.000 claims description 40
- 238000002309 gasification Methods 0.000 claims description 11
- 238000004949 mass spectrometry Methods 0.000 claims description 11
- 238000004458 analytical method Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000000322 laser mass spectrometry Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000011163 secondary particle Substances 0.000 description 4
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062713A JPS62219451A (ja) | 1986-03-20 | 1986-03-20 | レ−ザ質量分析装置 |
| US06/873,376 US4740692A (en) | 1985-06-13 | 1986-06-12 | Laser mass spectroscopic analyzer and method |
| GB08614362A GB2177507B (en) | 1985-06-13 | 1986-06-12 | Laser mass spectroscopic analyzer |
| DE19863619886 DE3619886A1 (de) | 1985-06-13 | 1986-06-13 | Vorrichtung zur massenspektrometrischen analyse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062713A JPS62219451A (ja) | 1986-03-20 | 1986-03-20 | レ−ザ質量分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62219451A JPS62219451A (ja) | 1987-09-26 |
| JPH0542105B2 true JPH0542105B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Family
ID=13208245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61062713A Granted JPS62219451A (ja) | 1985-06-13 | 1986-03-20 | レ−ザ質量分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62219451A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4859140B2 (ja) * | 2007-09-19 | 2012-01-25 | 株式会社日立製作所 | イオン源とそれを用いた濃縮装置およびイオン源の運転方法 |
| CN107851550B (zh) * | 2015-07-13 | 2019-06-28 | 株式会社岛津制作所 | 闸门 |
-
1986
- 1986-03-20 JP JP61062713A patent/JPS62219451A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62219451A (ja) | 1987-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4740692A (en) | Laser mass spectroscopic analyzer and method | |
| JP5354850B2 (ja) | 表面分析用分光装置と分析方法 | |
| JP3820964B2 (ja) | 電子線を用いた試料観察装置および方法 | |
| JP5075142B2 (ja) | デュアルモードガス電界イオン源 | |
| JP5087366B2 (ja) | 多目的用途用ガス電界イオン源 | |
| US4733073A (en) | Method and apparatus for surface diagnostics | |
| JP2020101551A (ja) | チャンバ内流体処理装置 | |
| US7180058B1 (en) | LDI/MALDI source for enhanced spatial resolution | |
| JP3333533B2 (ja) | 荷電粒子抽出装置 | |
| US6963066B2 (en) | Rod assembly in ion source | |
| JPH0542105B2 (enrdf_load_stackoverflow) | ||
| JPH06124680A (ja) | ２次中性粒子質量分析装置 | |
| JPH08148116A (ja) | 顕微レーザ飛行時間型質量分析計 | |
| JP3643917B2 (ja) | 顕微レーザ質量分析計 | |
| JPH01500547A (ja) | Ｘ光電子の分光による固体材料表面における局所的化学分析用の装置及びその方法 | |
| JPS61285649A (ja) | レ−ザ−質量分析装置 | |
| JP2002365182A5 (enrdf_load_stackoverflow) | ||
| JPS62133339A (ja) | ルミネツセンス測定装置 | |
| JPH11288683A (ja) | 大気圧イオン化質量分析計 | |
| US20240055247A1 (en) | Off-axis ion extraction and shield glass assemblies for sample analysis systems | |
| US6633032B2 (en) | Mass spectrometer particle counter | |
| JPH07226184A (ja) | 質量分析計 | |
| JP2000215842A (ja) | 複合放出電子顕微鏡におけるその場観察システム | |
| JPH0945276A (ja) | 質量分析計 | |
| JP2010071873A (ja) | イオンエネルギーの分光方法および分光装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |