JPS62219451A - レ−ザ質量分析装置 - Google Patents
レ−ザ質量分析装置Info
- Publication number
- JPS62219451A JPS62219451A JP61062713A JP6271386A JPS62219451A JP S62219451 A JPS62219451 A JP S62219451A JP 61062713 A JP61062713 A JP 61062713A JP 6271386 A JP6271386 A JP 6271386A JP S62219451 A JPS62219451 A JP S62219451A
- Authority
- JP
- Japan
- Prior art keywords
- introduction
- laser
- sample
- laser beam
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062713A JPS62219451A (ja) | 1986-03-20 | 1986-03-20 | レ−ザ質量分析装置 |
| GB08614362A GB2177507B (en) | 1985-06-13 | 1986-06-12 | Laser mass spectroscopic analyzer |
| US06/873,376 US4740692A (en) | 1985-06-13 | 1986-06-12 | Laser mass spectroscopic analyzer and method |
| DE19863619886 DE3619886A1 (de) | 1985-06-13 | 1986-06-13 | Vorrichtung zur massenspektrometrischen analyse |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61062713A JPS62219451A (ja) | 1986-03-20 | 1986-03-20 | レ−ザ質量分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62219451A true JPS62219451A (ja) | 1987-09-26 |
| JPH0542105B2 JPH0542105B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Family
ID=13208245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61062713A Granted JPS62219451A (ja) | 1985-06-13 | 1986-03-20 | レ−ザ質量分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62219451A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009076222A (ja) * | 2007-09-19 | 2009-04-09 | Hitachi Ltd | イオン源とそれを用いた濃縮装置およびイオン源の運転方法 |
| WO2017010163A1 (ja) * | 2015-07-13 | 2017-01-19 | 株式会社島津製作所 | シャッター |
-
1986
- 1986-03-20 JP JP61062713A patent/JPS62219451A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009076222A (ja) * | 2007-09-19 | 2009-04-09 | Hitachi Ltd | イオン源とそれを用いた濃縮装置およびイオン源の運転方法 |
| WO2017010163A1 (ja) * | 2015-07-13 | 2017-01-19 | 株式会社島津製作所 | シャッター |
| JPWO2017010163A1 (ja) * | 2015-07-13 | 2018-04-19 | 株式会社島津製作所 | シャッター |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542105B2 (enrdf_load_stackoverflow) | 1993-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4740692A (en) | Laser mass spectroscopic analyzer and method | |
| JP5354850B2 (ja) | 表面分析用分光装置と分析方法 | |
| JPH09106780A (ja) | 表面分析装置および方法 | |
| Wiesendanger et al. | The LMS-GT instrument–a new perspective for quantification with the LIMS-TOF measurement technique | |
| US6963066B2 (en) | Rod assembly in ion source | |
| JP3240857B2 (ja) | プラズマイオン質量分析装置及びプラズマイオン質量分析方法 | |
| US4296323A (en) | Secondary emission mass spectrometer mechanism to be used with other instrumentation | |
| JPS62219451A (ja) | レ−ザ質量分析装置 | |
| JP2015502645A (ja) | 質量分析法における、又は質量分析法に関連する改良 | |
| Liebl | Beam optics in secondary ion mass spectrometry | |
| JP2019102464A (ja) | 改善されたeels/eftemモジュールを有する透過型荷電粒子顕微鏡 | |
| US4001582A (en) | Local surface analysis | |
| JP5234946B2 (ja) | イオンエネルギーの分光方法および分光装置 | |
| JP3643917B2 (ja) | 顕微レーザ質量分析計 | |
| US20240055247A1 (en) | Off-axis ion extraction and shield glass assemblies for sample analysis systems | |
| JPS61285649A (ja) | レ−ザ−質量分析装置 | |
| US20250174452A1 (en) | Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and method of residual gas analysis | |
| US6633032B2 (en) | Mass spectrometer particle counter | |
| JP2000215842A (ja) | 複合放出電子顕微鏡におけるその場観察システム | |
| JPH0589823A (ja) | 質量分析計 | |
| JPH07226184A (ja) | 質量分析計 | |
| WO2025207231A1 (en) | High-performance adaptable sampling system | |
| Kodama et al. | Combined Spectrometer with the Techniques of SIMS, ISS, AES and XPS | |
| Sappey | Resonance-enhanced multiphoton ionization photoion and photoelectron spectroscopy of jet-cooled species | |
| Binetti | Non-adiabatic reaction pathways in the dissociative adsorption of Oxygen on an Al (111) surface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |