JPH0541495Y2 - - Google Patents
Info
- Publication number
- JPH0541495Y2 JPH0541495Y2 JP1987181438U JP18143887U JPH0541495Y2 JP H0541495 Y2 JPH0541495 Y2 JP H0541495Y2 JP 1987181438 U JP1987181438 U JP 1987181438U JP 18143887 U JP18143887 U JP 18143887U JP H0541495 Y2 JPH0541495 Y2 JP H0541495Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- box
- block
- ionization
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000003780 insertion Methods 0.000 claims description 7
- 230000037431 insertion Effects 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 description 7
- 239000012212 insulator Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181438U JPH0541495Y2 (en, 2012) | 1987-11-28 | 1987-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181438U JPH0541495Y2 (en, 2012) | 1987-11-28 | 1987-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0186058U JPH0186058U (en, 2012) | 1989-06-07 |
| JPH0541495Y2 true JPH0541495Y2 (en, 2012) | 1993-10-20 |
Family
ID=31472921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181438U Expired - Lifetime JPH0541495Y2 (en, 2012) | 1987-11-28 | 1987-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0541495Y2 (en, 2012) |
-
1987
- 1987-11-28 JP JP1987181438U patent/JPH0541495Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0186058U (en, 2012) | 1989-06-07 |
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