JPH0537475Y2 - - Google Patents

Info

Publication number

JPH0537475Y2

JPH0537475Y2 JP2700288U JP2700288U JPH0537475Y2 JP H0537475 Y2 JPH0537475 Y2 JP H0537475Y2 JP 2700288 U JP2700288 U JP 2700288U JP 2700288 U JP2700288 U JP 2700288U JP H0537475 Y2 JPH0537475 Y2 JP H0537475Y2

Authority

JP

Japan

Prior art keywords

pusher

carrier

boat

wafers

holder

Prior art date

1988-02-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

• Espacenet
• Global Dossier
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• 235000012431 wafers Nutrition 0.000 claims description 89
• 239000004065 semiconductor Substances 0.000 claims description 23
• 238000001514 detection method Methods 0.000 claims description 17
• 238000010438 heat treatment Methods 0.000 description 7
• 238000000034 method Methods 0.000 description 7
• 230000006835 compression Effects 0.000 description 5
• 238000007906 compression Methods 0.000 description 5
• 239000007788 liquid Substances 0.000 description 5
• 230000003028 elevating effect Effects 0.000 description 4
• 239000011295 pitch Substances 0.000 description 3
• 230000035945 sensitivity Effects 0.000 description 3
• 238000003860 storage Methods 0.000 description 3
• 239000004809 Teflon Substances 0.000 description 2
• 229920006362 Teflon® Polymers 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 239000000969 carrier Substances 0.000 description 1
• 238000004140 cleaning Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1
• 239000011347 resin Substances 0.000 description 1
• 229920005989 resin Polymers 0.000 description 1