JPH0249717Y2 - - Google Patents

Info

Publication number

JPH0249717Y2

JPH0249717Y2 JP2700488U JP2700488U JPH0249717Y2 JP H0249717 Y2 JPH0249717 Y2 JP H0249717Y2 JP 2700488 U JP2700488 U JP 2700488U JP 2700488 U JP2700488 U JP 2700488U JP H0249717 Y2 JPH0249717 Y2 JP H0249717Y2

Authority

JP

Japan

Prior art keywords

boat

wafer

wafers

base

pins

Prior art date

1988-02-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 173
• 239000004065 semiconductor Substances 0.000 claims description 28
• 239000011295 pitch Substances 0.000 claims description 11
• 238000001514 detection method Methods 0.000 description 12
• 230000007246 mechanism Effects 0.000 description 9
• 238000000034 method Methods 0.000 description 6
• 239000004809 Teflon Substances 0.000 description 3
• 229920006362 Teflon® Polymers 0.000 description 3
• 230000000630 rising effect Effects 0.000 description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 239000000835 fiber Substances 0.000 description 2
• 239000007788 liquid Substances 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000003028 elevating effect Effects 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1