JPH01130536U - - Google Patents

Info

Publication number
JPH01130536U
JPH01130536U JP2700288U JP2700288U JPH01130536U JP H01130536 U JPH01130536 U JP H01130536U JP 2700288 U JP2700288 U JP 2700288U JP 2700288 U JP2700288 U JP 2700288U JP H01130536 U JPH01130536 U JP H01130536U
Authority
JP
Japan
Prior art keywords
pusher
carrier
pushers
semiconductor wafers
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2700288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2700288U priority Critical patent/JPH0537475Y2/ja
Publication of JPH01130536U publication Critical patent/JPH01130536U/ja
Application granted granted Critical
Publication of JPH0537475Y2 publication Critical patent/JPH0537475Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2700288U 1988-02-29 1988-02-29 Expired - Lifetime JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2700288U JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2700288U JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-29 1988-02-29

Publications (2)

Publication Number Publication Date
JPH01130536U true JPH01130536U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-09-05
JPH0537475Y2 JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-22

Family

ID=31249129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2700288U Expired - Lifetime JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0537475Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-22

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