JPH0537473Y2 - - Google Patents
Info
- Publication number
- JPH0537473Y2 JPH0537473Y2 JP16999688U JP16999688U JPH0537473Y2 JP H0537473 Y2 JPH0537473 Y2 JP H0537473Y2 JP 16999688 U JP16999688 U JP 16999688U JP 16999688 U JP16999688 U JP 16999688U JP H0537473 Y2 JPH0537473 Y2 JP H0537473Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- temperature
- chemical liquid
- heating device
- chemical solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 63
- 239000007788 liquid Substances 0.000 claims description 32
- 238000010438 heat treatment Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 13
- 230000005674 electromagnetic induction Effects 0.000 claims description 9
- 239000000243 solution Substances 0.000 description 20
- 235000012431 wafers Nutrition 0.000 description 11
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910001120 nichrome Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999688U JPH0537473Y2 (enExample) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16999688U JPH0537473Y2 (enExample) | 1988-12-28 | 1988-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0289830U JPH0289830U (enExample) | 1990-07-17 |
| JPH0537473Y2 true JPH0537473Y2 (enExample) | 1993-09-22 |
Family
ID=31460554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16999688U Expired - Lifetime JPH0537473Y2 (enExample) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0537473Y2 (enExample) |
-
1988
- 1988-12-28 JP JP16999688U patent/JPH0537473Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0289830U (enExample) | 1990-07-17 |
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