JPH0536058A - Magnetic disk substrate - Google Patents

Magnetic disk substrate

Info

Publication number
JPH0536058A
JPH0536058A JP18770591A JP18770591A JPH0536058A JP H0536058 A JPH0536058 A JP H0536058A JP 18770591 A JP18770591 A JP 18770591A JP 18770591 A JP18770591 A JP 18770591A JP H0536058 A JPH0536058 A JP H0536058A
Authority
JP
Japan
Prior art keywords
resin layer
magnetic disk
titanium
disk substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18770591A
Other languages
Japanese (ja)
Inventor
Yoko Okano
陽子 岡野
Hiroyoshi Suenaga
博義 末永
Toshio Sakiyama
利夫 崎山
Kenji Morita
健治 森田
Masaki Omura
雅紀 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP18770591A priority Critical patent/JPH0536058A/en
Publication of JPH0536058A publication Critical patent/JPH0536058A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the extremely good surface state and CSS characteristics of the magnetic disk substrate formed with a resin layer on a titanium material and to enhance the adhesion between the titanium material and the resin layer. CONSTITUTION:The magnetic disk substrate is formed by forming the resin layer consisting of a synthetic rein on a disk-shaped core material consisting of the titanium material. The thickness of the resin layer, designated as t1 (mu), is t1<300mum and the t1 and the surface roughness RmaxS (mum) of the core material satisfy the relation t1/RmaxS>3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明はチタン材を芯材とする
磁気ディスク基板に関し、特に、表面精度に優れた磁気
ディスク基板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk substrate having a titanium material as a core material, and more particularly to a magnetic disk substrate having excellent surface accuracy.

【0002】[0002]

【従来技術及び発明が解決しようとする課題】磁気ディ
スク装置に使用される高性能磁気ディスクは、高保磁力
の薄膜磁気記録媒体であることが必要条件だが、このよ
うな薄膜磁気記録媒体が平滑で欠陥なく形成されるため
には、磁気記録媒体が形成される基板そのものの表面精
度が良好である必要がある。
2. Description of the Related Art A high-performance magnetic disk used in a magnetic disk device is required to be a thin film magnetic recording medium having a high coercive force, but such a thin film magnetic recording medium is smooth. In order to form without defects, the surface accuracy of the substrate itself on which the magnetic recording medium is formed needs to be good.

【0003】しかし、現在用いられているAl合金基板
には、基板に必然的に含まれる介在物により欠陥を生じ
ること、及び研磨工程で残存する傷等を皆無にすること
が不可能であることなどの不都合があるため、近年、基
板上に有機物を塗布し、この有機物層により表面精度を
得る方法が提案されている(例えば、特開昭58−18
9836,昭60−167110,昭61−10572
5)。これらの方法では、合成樹脂の種類や塗布の方法
が提案され、樹脂層の厚さは0.5〜500μmの例が
示されている。
However, in the Al alloy substrates currently used, it is impossible to cause defects due to inclusions inevitably included in the substrates and to eliminate scratches and the like remaining in the polishing process. Due to such inconveniences, a method has recently been proposed in which an organic material is applied onto a substrate and the surface accuracy is obtained by the organic material layer (for example, JP-A-58-18).
9836, Sho 60-167110, Sho 61-10572.
5). In these methods, types of synthetic resins and coating methods are proposed, and examples in which the thickness of the resin layer is 0.5 to 500 μm are shown.

【0004】ところで、従来より用いられているAl合
金製の磁気ディスク基板は、その上に磁性膜(磁気媒
体)を形成する際における高温スパッタリングに対する
耐熱性が不足し、また、基板の薄肉化の要請に対しては
剛性が不足している。これらの要求を満たすために、磁
気ディスク基板としてセラミック,ガラス,チタン等新
しい材料が用いられつつある。中でもチタンは耐熱性に
優れ、剛性,強度が高く、かつ高洗浄度が得られるた
め、磁気ディスク基板材料として適している。
By the way, the conventional magnetic disk substrate made of Al alloy lacks heat resistance against high temperature sputtering when a magnetic film (magnetic medium) is formed on the magnetic disk substrate, and the substrate is thinned. Insufficient rigidity for the request. In order to meet these requirements, new materials such as ceramics, glass and titanium are being used as magnetic disk substrates. Among them, titanium is suitable as a magnetic disk substrate material because it has excellent heat resistance, high rigidity, high strength, and high cleaning degree.

【0005】しかし、チタンは難加工性材料であるた
め、良好な表面性状を安定性良く製造することが困難で
あり、このため、チタンを磁気ディスク基板として使用
する上での制約となっている。
However, since titanium is a difficult-to-process material, it is difficult to manufacture it with good surface properties with good stability, which limits the use of titanium as a magnetic disk substrate. ..

【0006】一方、前述したAl合金基板上に有機物を
塗布する方法は、Al合金芯材の表面性状によらず良好
な表面性状を得る方法であるため、この方法がそのまま
チタン製磁気ディスク基板に適用できれば、チタンの鏡
面加工が不用となり、非常に有効なチタン製磁気ディス
ク基板の製造方法になると期待される。
On the other hand, the above-mentioned method of applying an organic substance on the Al alloy substrate is a method of obtaining a good surface texture regardless of the surface texture of the Al alloy core material, and therefore this method is directly applied to the titanium magnetic disk substrate. If it can be applied, the mirror finishing of titanium will be unnecessary, and it is expected to be a very effective method for producing a magnetic disk substrate made of titanium.

【0007】しかしながら、未だチタン材を用いてその
上に有機物を塗布する磁気ディスク基板は開発されてい
ないのが現状である。本願発明者らも、チタン材に樹脂
を塗布して磁気ディスク基板を得る方法の検討をこれま
で進めているが、最適な塗布方法を決定することができ
ない状態であった。これは、樹脂層の厚さが厚い場合、
チタン製基板と樹脂層との剥離を生じ、また、樹脂層の
厚さが薄い場合、CSS特性の低下があるためである。
However, at present, a magnetic disk substrate in which a titanium material is used and an organic material is applied thereon has not yet been developed. The inventors of the present application have been studying a method of applying a resin to a titanium material to obtain a magnetic disk substrate, but the optimum application method could not be determined. This is because if the resin layer is thick,
This is because the titanium substrate is peeled off from the resin layer, and when the resin layer is thin, the CSS characteristics are deteriorated.

【0008】この発明はかかる事情に鑑みてなされたも
のであって、チタン材の上に樹脂層を形成した磁気ディ
スク基板において、極めて表面状態及びCSS特性が良
好で、しかもチタン材と樹脂層との密着性が高い磁気デ
ィスク基板を提供することを目的とする。
The present invention has been made in view of the above circumstances, and in a magnetic disk substrate in which a resin layer is formed on a titanium material, the surface state and CSS characteristics are extremely good, and the titanium material and the resin layer are combined. It is an object of the present invention to provide a magnetic disk substrate having high adhesion.

【0009】[0009]

【課題を解決するための手段及び作用】この発明は、こ
のような課題を解決するために、チタン材からなる円板
状の芯材と、その上に設けられた合成樹脂からなる樹脂
層とを有する磁気ディスク基板であって、前記樹脂層の
厚さをt1 (μm)とするとき、t1 <300μmであ
り、t1 と芯材の表面粗さRmaxSとが以下の関係を満た
すことを特徴とする磁気ディスク基板を提供する。 t1 /RmaxS>3
In order to solve such a problem, the present invention provides a disc-shaped core material made of a titanium material, and a resin layer made of a synthetic resin provided thereon. And a thickness of the resin layer is t 1 (μm), t 1 <300 μm, and t 1 and the surface roughness R maxS of the core material satisfy the following relationship. A magnetic disk substrate characterized by the above. t 1 / R maxS > 3

【0010】チタン材に樹脂層を設け、これらの剥離が
生じることなく、表面粗さが良好な磁気ディスク基板を
得べく、本願発明者らが詳しく考察した結果、以下の結
論に達した。
The inventors of the present application have made a detailed study in order to obtain a magnetic disk substrate having a resin layer formed on a titanium material and having a good surface roughness without peeling of these layers, and as a result, the following conclusions have been reached.

【0011】樹脂層とチタン製基板と樹脂層との剥離
は、樹脂層が厚い場合に、両者の線膨張係数の差により
生じ、剥離を防止するためには樹脂層の厚さに上限が存
在する。これは、樹脂の線膨張係数は数10〜100×
10-6/℃,Al合金の線膨張係数は23.0×10-6
/℃,チタンの線膨張係数は8.4×10-6/℃であ
り、チタンと樹脂の線膨張差がAl合金と樹脂の線膨張
差より大きいことに起因する。つまり、樹脂層の硬化処
理、及びスパッタリング時に基板の温度が上昇するが、
その際のチタン材と樹脂層との膨張量の差に起因して剥
離が生じるのである。
The peeling of the resin layer from the titanium substrate and the resin layer occurs due to the difference in linear expansion coefficient between the two when the resin layer is thick, and there is an upper limit to the thickness of the resin layer in order to prevent peeling. To do. This is because the linear expansion coefficient of the resin is several 10 to 100 ×
10 -6 / ° C, the linear expansion coefficient of Al alloy is 23.0 × 10 -6
/ ° C., the linear expansion coefficient of titanium is 8.4 × 10 −6 / ° C., and this is because the difference in linear expansion between titanium and resin is larger than the difference in linear expansion between Al alloy and resin. That is, the temperature of the substrate rises during the curing treatment of the resin layer and the sputtering,
At that time, peeling occurs due to the difference in expansion amount between the titanium material and the resin layer.

【0012】一方、樹脂層の厚さが薄い場合には耐ヘッ
ドクラッシュ性が低下する。これは、チタン材はその軟
質性(変形しやすく、しかもバリとなりやすい)に起因
して耐ヘッドクラッシュ性がNiPメッキタイプAl合
金基板と比較して低く、樹脂層が薄すぎる場合には、こ
のチタン材の耐ヘッドクラッシュ性が支配的になるから
である。すなわち、本発明の磁気ディスクは、樹脂層の
クッション性によってチタン材の耐ヘッドクラッシュ性
を改善しているため、良好なCSS特性を得るには必要
な最低限の厚さが存在するのである。
On the other hand, when the resin layer is thin, the head crush resistance is lowered. This is because the titanium material has a lower head crush resistance than the NiP plating type Al alloy substrate due to its softness (it is easily deformed and easily becomes burr), and when the resin layer is too thin, This is because the head crash resistance of the titanium material becomes dominant. That is, since the magnetic disk of the present invention improves the head crush resistance of the titanium material due to the cushioning property of the resin layer, the minimum thickness necessary for obtaining good CSS characteristics exists.

【0013】このように、本願発明における樹脂層はチ
タン基板の表面粗さを改善すると共に、一種のクッショ
ンとして働きCSS特性を改善する。このため樹脂層の
厚さが大きい程、表面粗さ及びCSS特性を改善するこ
ととなる。しかし一方で、上述したように樹脂層とチタ
ンとの線膨張係数が大きく異なるため、両者の剥離を防
止するには樹脂層の厚さを300μm未満とする必要が
ある。また、クッション性を確保するには、チタン芯材
の表面粗さRmaxSとの関係で、その厚さが、RmaxSの3
倍以上である必要がある。
As described above, the resin layer in the present invention improves the surface roughness of the titanium substrate and also acts as a kind of cushion to improve the CSS characteristics. Therefore, the larger the thickness of the resin layer, the more the surface roughness and CSS characteristics are improved. On the other hand, on the other hand, since the linear expansion coefficient of the resin layer and that of titanium are greatly different from each other as described above, it is necessary to set the thickness of the resin layer to less than 300 μm in order to prevent the two from peeling. Further, in order to ensure the cushioning property, the thickness of the titanium core material is 3 of R maxS in relation to the surface roughness R maxS of the titanium core material.
Must be more than double.

【0014】ここで樹脂層を構成する合成樹脂は、チタ
ン芯材との接着性が優れたものであれば特に限定されな
いが、ウレタン系,エポキシ系,メラニン系,メタクリ
ル系,ABS系,ポリカーボネイト系,ジアルフタレー
ト系等が適用可能である。なお、この発明においてチタ
ンとあるのは純チタン及びチタン合金の両方を含むこと
を意図するものである。
The synthetic resin constituting the resin layer is not particularly limited as long as it has excellent adhesiveness to the titanium core material, but urethane type, epoxy type, melanin type, methacrylic type, ABS type, polycarbonate type is used. , Dialphtalate type, etc. are applicable. In the present invention, the term "titanium" is intended to include both pure titanium and titanium alloy.

【0015】[0015]

【実施例】3.5インチサイズ,板厚0.5mmのCP
2種純チタン製ディスク基板素材の両表面を#400砥
石を用いた両面研磨機により研磨加工を施し、表面粗さ
が、RmaxS2.1μmの基板とした。
[Example] CP of 3.5 inch size and 0.5 mm in plate thickness
Both surfaces of the two kinds of pure titanium disk substrate material were polished by a double-sided polishing machine using # 400 grindstone to obtain a substrate having a surface roughness of R maxS 2.1 μm.

【0016】次に、この基板を洗浄,乾燥の後、両面同
時スピンコート機にセットし、室温25℃,回転数20
00rpmでメラミン樹脂液をスピンコートした。メラ
ミン樹脂液の溶媒成分を増減し粘度を調整することでス
ピンコート厚を変化させた。そして、そのスピンコート
した基板をオーブン中で回転させながら、150℃×3
0分間のプリベークを行い溶剤を蒸発させ、さらに熱処
理温度を275℃に昇温して10分間の本ベークを行
い、硬化反応を完了させた。スピンコート後の樹脂厚
さ,樹脂の表面粗さRmaxRは、それぞれエリプソメー
タ,表面粗さ計で測定した。その結果、樹脂厚さは5μ
m〜400μmであり、また樹脂の表面粗さRmaxRはい
ずれも0.03〜0.05μmと良好であった。
Next, after washing and drying this substrate, the substrate was set on a double-sided simultaneous spin coater at room temperature of 25 ° C. and rotation speed of 20.
The melamine resin solution was spin coated at 00 rpm. The spin coating thickness was changed by adjusting the viscosity by increasing or decreasing the solvent component of the melamine resin solution. Then, while rotating the spin-coated substrate in an oven, 150 ° C. × 3
Pre-baking was performed for 0 minutes to evaporate the solvent, and the heat treatment temperature was raised to 275 ° C. and main baking was performed for 10 minutes to complete the curing reaction. The resin thickness after spin coating and the surface roughness R maxR of the resin were measured by an ellipsometer and a surface roughness meter, respectively. As a result, the resin thickness is 5μ
m to 400 μm, and the surface roughness R maxR of the resin was 0.03 to 0.05 μm, which was good.

【0017】次に、スパッタリングにより所要の磁気媒
体及び保護膜を形成し、さらにスピンコートにより潤滑
材塗布を行い磁気ディスクを作成した。まずCr下地層
を150nmの膜厚で形成し、次にCoNiCr膜を4
0nmに成膜して磁性層とし、さらにその上に保護,潤
滑層としてa−C層をスパッタで成膜して磁気ディスク
とした。なお、以上の各層は一例であり、強磁性金属薄
膜磁気ディスクの層構成はこれに限定されるものではな
い。
Next, a required magnetic medium and a protective film were formed by sputtering, and a lubricant was applied by spin coating to prepare a magnetic disk. First, a Cr underlayer is formed to a thickness of 150 nm, and then a CoNiCr film is formed to a thickness of 4 nm.
A magnetic layer was formed by forming a film with a thickness of 0 nm, and an aC layer was further formed thereon as a protective and lubricating layer by sputtering to form a magnetic disk. The above layers are examples, and the layer structure of the ferromagnetic metal thin film magnetic disk is not limited to this.

【0018】このスパッタディスクについて試験した結
果を表1に示す。表中CSS特性はヘッドとディスクと
の接触回数で表され、ディスクの耐ヘッド強度を表す尺
度である。すなわち、CSS回数は、磁性膜の剥離やヘ
ッドのチタン製磁気ディスク基板への打痕変形を原因と
してヘッドが破損するまでの回数である。現状の磁気デ
ィスク基板では、CSS回数30000回以上が判断基
準となっている。また、剥離の有無は磁気ディスクを作
成後目視で接合部を観察することにより行った。
The test results of this sputter disk are shown in Table 1. In the table, the CSS characteristic is represented by the number of contact between the head and the disk, and is a measure of the head strength of the disk. That is, the number of times of CSS is the number of times until the head is damaged due to the peeling of the magnetic film or the dent deformation of the titanium magnetic disk substrate. In the current magnetic disk substrate, the number of CSS times of 30,000 or more is a criterion. In addition, the presence or absence of peeling was determined by visually observing the bonded portion after the magnetic disk was created.

【0019】[0019]

【表1】 [Table 1]

【0020】この表1から明らかなように、t1 /R
maxSの値が3以下の場合にはCSS回数が小さくCSS
特性が悪いことが確認された。また樹脂層の厚さが30
0μm以上の場合には剥離が生じていることが確認され
た。これに対して、t1 /RmaxS>3で、かつ樹脂層の
厚さが300μm未満の場合には、CSS特性が良好
で、しかも樹脂層の剥離も生じないことが確認された。
As is clear from Table 1, t 1 / R
If the value of maxS is 3 or less, the number of CSS is small and CSS
It was confirmed that the characteristics were poor. Moreover, the thickness of the resin layer is 30
It was confirmed that peeling occurred in the case of 0 μm or more. On the other hand, it was confirmed that when t 1 / R maxS > 3 and the thickness of the resin layer is less than 300 μm, the CSS characteristics are good and the resin layer does not peel off.

【0021】[0021]

【発明の効果】この発明によれば、チタン板の上に特定
厚みの樹脂層を設けたため、良好な表面粗さを得ること
ができ、また、磁気ヘッドがその上に形成された記録層
に衝突しても樹脂層がその衝撃力を緩和し、耐ヘッドク
ラッシング性を大幅に向上させることができる。
According to the present invention, since the resin layer having a specific thickness is provided on the titanium plate, good surface roughness can be obtained, and the magnetic head can be formed on the recording layer formed thereon. The resin layer absorbs the impact force even if it collides, and the head crushing resistance can be greatly improved.

【0022】つまり、本発明により簡便に、チタン材を
磁気ディスク基板として用いた場合における、表面粗さ
及び耐ヘッドクラッシング性の改善が可能となり、産業
上多大な効果を有する。
That is, according to the present invention, it is possible to easily improve the surface roughness and the head crushing resistance when the titanium material is used as the magnetic disk substrate, which has a great industrial effect.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 森田 健治 東京都千代田区丸の内一丁目1番2号 日 本鋼管株式会社内 (72)発明者 大村 雅紀 東京都千代田区丸の内一丁目1番2号 日 本鋼管株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenji Morita, 1-2, Marunouchi, Chiyoda-ku, Tokyo Nihon Kokan Co., Ltd. (72) Masanori Omura, 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Main Steel Pipe Co., Ltd.

Claims (1)

【特許請求の範囲】 【請求項1】 チタン材からなる円板状の芯材と、その
上に設けられた合成樹脂からなる樹脂層とを有する磁気
ディスク基板であって、前記樹脂層の厚さをt1 (μ
m)とするとき、t1 <300μmであり、t1と芯材
の表面粗さRmaxS(μm)とが以下の関係を満たすこと
を特徴とする磁気ディスク基板。 t1 /RmaxS>3
Claim: What is claimed is: 1. A magnetic disk substrate having a disk-shaped core material made of a titanium material and a resin layer made of a synthetic resin provided on the disk-shaped core material. T 1
m), t 1 <300 μm, and t 1 and the surface roughness R maxS (μm) of the core material satisfy the following relationship. t 1 / R maxS > 3
JP18770591A 1991-07-26 1991-07-26 Magnetic disk substrate Pending JPH0536058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18770591A JPH0536058A (en) 1991-07-26 1991-07-26 Magnetic disk substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18770591A JPH0536058A (en) 1991-07-26 1991-07-26 Magnetic disk substrate

Publications (1)

Publication Number Publication Date
JPH0536058A true JPH0536058A (en) 1993-02-12

Family

ID=16210726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18770591A Pending JPH0536058A (en) 1991-07-26 1991-07-26 Magnetic disk substrate

Country Status (1)

Country Link
JP (1) JPH0536058A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007099754A1 (en) * 2006-03-03 2007-09-07 Konica Minolta Opto, Inc. Substrate for magnetic recording medium and method for manufacturing such substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105725A (en) * 1984-10-29 1986-05-23 Sumitomo Bakelite Co Ltd Magnetic disk
JPH02273321A (en) * 1989-04-14 1990-11-07 Nkk Corp Production of magnetic disk substrate made of titanium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105725A (en) * 1984-10-29 1986-05-23 Sumitomo Bakelite Co Ltd Magnetic disk
JPH02273321A (en) * 1989-04-14 1990-11-07 Nkk Corp Production of magnetic disk substrate made of titanium

Cited By (3)

* Cited by examiner, † Cited by third party
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WO2007099754A1 (en) * 2006-03-03 2007-09-07 Konica Minolta Opto, Inc. Substrate for magnetic recording medium and method for manufacturing such substrate
JPWO2007099754A1 (en) * 2006-03-03 2009-07-16 コニカミノルタオプト株式会社 Magnetic recording medium substrate and method for manufacturing the same
JP5062167B2 (en) * 2006-03-03 2012-10-31 コニカミノルタアドバンストレイヤー株式会社 Substrate for magnetic recording medium

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