JPH0758545B2 - Method of manufacturing thin film magnetic recording medium - Google Patents

Method of manufacturing thin film magnetic recording medium

Info

Publication number
JPH0758545B2
JPH0758545B2 JP63194912A JP19491288A JPH0758545B2 JP H0758545 B2 JPH0758545 B2 JP H0758545B2 JP 63194912 A JP63194912 A JP 63194912A JP 19491288 A JP19491288 A JP 19491288A JP H0758545 B2 JPH0758545 B2 JP H0758545B2
Authority
JP
Japan
Prior art keywords
thin film
layer
recording medium
medium
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63194912A
Other languages
Japanese (ja)
Other versions
JPH0244519A (en
Inventor
敏幸 小林
照久 横澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP63194912A priority Critical patent/JPH0758545B2/en
Publication of JPH0244519A publication Critical patent/JPH0244519A/en
Publication of JPH0758545B2 publication Critical patent/JPH0758545B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、固定磁気ディスク装置に用いられる、強磁
性金属薄膜からなる磁性層を備えた薄膜磁気記録媒体の
製造方法に関する。
Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a thin film magnetic recording medium having a magnetic layer made of a ferromagnetic metal thin film, which is used in a fixed magnetic disk device.

〔従来の技術〕 薄膜磁気記録媒体は、通常、非磁性基体上に非磁性金属
下地層,磁性層,保護層,潤滑層がそれぞれ薄膜で順次
積層された層構成である。非磁性基体としてはAl合金基
板に無電解めっきでNi−P合金層が形成されたものが用
いられる。Ni−P合金層はその上に積層される各薄膜の
機械的強度を補強するために設けられる。非磁性金属下
地層は磁気特性を高めるために設けられるもので、一般
にはCrが用いられ、スパッタ法で形成される。磁性層は
一般にCo系合金,例えばCo−Ni合金が用いられ、スパッ
タ法で形成される。保護層は耐食性,耐磨耗性を向上さ
せるために設けられるもので、一般にアモルファスカー
ボン(a−C)またはSiO2が用いられ、スパッタ法など
で形成される。潤滑層は耐磨耗性などを高めるために設
けられるもので、液体潤滑剤または固体潤滑剤を塗布し
て形成される。
[Prior Art] A thin-film magnetic recording medium usually has a layer structure in which a non-magnetic metal underlayer, a magnetic layer, a protective layer, and a lubricating layer are sequentially laminated in a thin film on a non-magnetic substrate. As the non-magnetic substrate, an Al alloy substrate on which a Ni-P alloy layer is formed by electroless plating is used. The Ni-P alloy layer is provided to reinforce the mechanical strength of each thin film laminated thereon. The non-magnetic metal underlayer is provided to enhance the magnetic properties, and generally Cr is used and is formed by the sputtering method. The magnetic layer generally uses a Co-based alloy, for example, a Co-Ni alloy, and is formed by the sputtering method. The protective layer is provided to improve corrosion resistance and abrasion resistance, and generally amorphous carbon (a-C) or SiO 2 is used and is formed by a sputtering method or the like. The lubricating layer is provided to enhance abrasion resistance and is formed by applying a liquid lubricant or a solid lubricant.

〔発明が解決しようとする課題〕[Problems to be Solved by the Invention]

上述の液体潤滑剤を潤滑層として塗布する方法として
は、ディップ法,スピンコート法,スプレーバフ法など
がある。しかしながら、どの方法を用いても、単に塗布
しただけでは充分満足できる性能を備えた潤滑層とはな
り得ず、媒体の信頼性試験において、機械的特性を評価
するためのコンタクト・スタート・ストップ(以下、CS
Sと称する)テスト,吸着力試験で摩擦係数が増加し、
実使用に際しても、CSSの繰り返しで摩擦係数が増大し
たり,磁気ヘッドの媒体表面への吸着が発生したりする
問題点があった。
As a method of applying the above-mentioned liquid lubricant as a lubricating layer, there are a dip method, a spin coat method, a spray buff method and the like. However, no matter which method is used, a simple coating does not provide a sufficiently satisfactory lubricating layer, and contact start / stop ( Below, CS
The friction coefficient increases in the S) test and the adsorption force test,
Even in actual use, there were problems that the coefficient of friction increased due to repeated CSS and that the magnetic head was attracted to the medium surface.

この発明は、上述の問題点を解消して、実使用に際して
CSSが繰り返されても摩擦係数が増大せず、媒体表面へ
の磁気ヘッドの吸着も生じにくい、耐久性に優れた、信
頼性の高い薄膜磁気記録媒体の製造方法を提供すること
を目的とする。
The present invention solves the above-mentioned problems and makes it possible for practical use.
An object of the present invention is to provide a highly reliable and highly reliable thin-film magnetic recording medium manufacturing method in which the friction coefficient does not increase even when CSS is repeated and the magnetic head is hardly attracted to the medium surface. .

〔課題を解決するための手段〕[Means for Solving the Problems]

本発明は、上述の目的を達成するため、強磁性金属薄膜
からなる磁性層上に保護層を形成し、この保護層上に液
体潤滑剤を塗布し、その表面に布を押し当ててバフを行
うことにより潤滑層を形成する薄膜磁気記録媒体の製造
方法において、前記保護層がアモルファスカーボンから
なると共に、前記潤滑層がフロロカーボン系潤滑剤から
なり、前記バフを行うときの面圧が2kg/cm2以上、3kg/c
m2以下であることを特徴としている。
In order to achieve the above object, the present invention forms a protective layer on a magnetic layer made of a ferromagnetic metal thin film, applies a liquid lubricant on the protective layer, and presses a cloth on the surface to buff. In the method of manufacturing a thin film magnetic recording medium to form a lubricating layer by performing, the protective layer is made of amorphous carbon, the lubricating layer is made of fluorocarbon lubricant, the surface pressure when performing the buffing is 2kg / cm 2 or more, 3 kg / c
It is characterized by being less than m 2 .

〔作用〕[Action]

保護層上にフロロカーボン系の液体潤滑剤を塗布した状
態では、第2図の媒体の要部部分断面図に示すように、
保護層1の表面に潤滑剤2が島状に付着していると思わ
れる。このような塗布面に布を押し当てて2kg/cm2
上、3kg/cm2以下の面圧でバフを行うことにより、第1
図の媒体の要部部分断面図に示すように潤滑剤2が膜厚
の厚い箇所から薄い箇所へ膜厚ばらつきを補正するよう
に流動し、保護層1上に膜厚均一な連続膜として潤滑剤
2からなる潤滑層が形成できることになる。潤滑層をこ
のような連続膜とすることにより、CSSテスト,吸着力
試験における摩擦係数を低減でき、磁気ヘッドの媒体へ
の吸着を防ぐことができる。
When the fluorocarbon liquid lubricant is applied on the protective layer, as shown in the partial sectional view of the main part of the medium of FIG.
It seems that the lubricant 2 is attached to the surface of the protective layer 1 in an island shape. Such pressing fabrics coated surface against with 2 kg / cm 2 or more, by performing the buff 3 kg / cm 2 or less of surface pressure, first
As shown in the partial cross-sectional view of the main part of the medium in the figure, the lubricant 2 flows from the thick film portion to the thin film portion so as to correct the film thickness variation, and lubricates as a continuous film having a uniform film thickness on the protective layer 1. A lubricant layer made of the agent 2 can be formed. By using such a continuous film as the lubricating layer, the friction coefficient in the CSS test and the attraction test can be reduced, and the attraction of the magnetic head to the medium can be prevented.

〔実施例〕〔Example〕

Al合金からなるディスク状基板に無電解めっきでNi−P
合金層を形成し、その表面に鏡面加工,テクスチァ加工
を施した後、その上にスパッタ法によりCrからなる非磁
性金属下地層,Co−Ni合金からなる磁性層,a−Cからな
る保護層を順次積層し、さらに、この上に、フロロカー
ボン系の液体潤滑剤を0.4重量%含有した溶剤をディッ
プ法により塗布した。このディスクを回転数100rpmで回
転させながら潤滑剤塗布面に布(研磨性のものではな
く、例えばワイピングクロス)を押しあててバフを行っ
て液体潤滑剤の均一な連続膜の潤滑層を有する媒体を作
製した。媒体面に布を押しあてる面圧を1.0,1.5,2.0,2.
5kg/cm2と変えて作製した媒体について、吸着力試験を
行った。吸着力試験は媒体と磁気ヘッドとを接触させた
状態で温度33℃,相対湿度80%の雰囲気中に1日間放置
し、その後静止摩擦係数を測定し、所定の規格値,例え
ば0.4以下を満足するかどうかで良否を判定した。その
結果、第3図に示したように面圧2.0,2.5kg/cm2で良と
判定され、面圧2.0kg/cm2以上で吸着が生じにくく、静
摩擦係数が小さく良好であることが判る。ところが、面
圧が3.0kg/cm2を超えると、バフを行うときに潤滑剤の
離脱が生じたり、布の融着が起きたりする問題が発生す
る。従って、バフを行うときの面圧は2.0kg/cm2以上3.0
kg/cm2以下の範囲であることが必要であり、より好まし
くは2.0kg/cm2以上2.5kg/cm2以下の範囲である。
Ni-P by electroless plating on a disk-shaped substrate made of Al alloy
An alloy layer is formed, and after its surface is mirror-finished or textured, a non-magnetic metal underlayer made of Cr, a magnetic layer made of Co-Ni alloy, and a protective layer made of a-C are formed on the surface by sputtering. Were sequentially laminated, and a solvent containing 0.4% by weight of a fluorocarbon liquid lubricant was applied thereon by a dip method. A medium having a lubricating layer of a uniform continuous film of liquid lubricant by pressing a cloth (for example, a wiping cloth) against the lubricant application surface while rotating this disk at 100 rpm to buff Was produced. The surface pressure of pressing the cloth against the medium surface is 1.0, 1.5, 2.0, 2.
The adsorption force test was performed on the medium prepared by changing the weight to 5 kg / cm 2 . In the adsorption test, the medium and the magnetic head are kept in contact with each other and left for 1 day in an atmosphere of temperature 33 ° C and relative humidity 80%, and then the static friction coefficient is measured to satisfy a predetermined standard value, for example 0.4 or less. The quality was judged by whether or not to do it. As a result, it is judged as valid surface pressure 2.0,2.5kg / cm 2 as shown in FIG. 3, hardly occurs adsorbed at a surface pressure of 2.0 kg / cm 2 or more, it can be seen that the coefficient of static friction is less good . However, if the surface pressure exceeds 3.0 kg / cm 2 , there is a problem in that the lubricant may separate during buffing or the cloth may be fused. Therefore, the surface pressure when buffing is 2.0 kg / cm 2 or more 3.0
It is necessary to be in the range of kg / cm 2 or less, and more preferably in the range of 2.0 kg / cm 2 or more and 2.5 kg / cm 2 or less.

また、面圧2.5kg/cm2でバフを行って作製した媒体と、
バフを行わなかった媒体とについてCSSテストを行つ
た。CSSサイクルと摩擦係数との関係を第4図の線図に
示す。第4図よりバフを行った媒体はCSSを繰り返して
も摩擦係数は増加せず、バフなしの媒体より優れている
ことは明らかである。
Also, with a medium produced by buffing at a surface pressure of 2.5 kg / cm 2 ,
CSS tests were performed on media that were not buffed. The relationship between CSS cycle and coefficient of friction is shown in the diagram in Fig. 4. It is clear from Fig. 4 that the buffed medium does not increase in friction coefficient even after repeated CSS, and is superior to the medium without buffing.

バフを行って作製した媒体と、同様に作製してバフのみ
を行わなかった媒体について、媒体の表面粗さと液体潤
滑剤からなる潤滑層の膜厚との関係を調べた。その測定
結果を第5図の線図に示す。ここで、表面粗さは媒体表
面の粗さのアボットの相対負荷曲線の10%の深さから1
%の深さを引いた差の値で示した。バフを行った媒体の
方がバフを行わなかった媒体に比べて潤滑層の膜厚が厚
く、また、表面粗さを示す数値が大きい程両者の膜厚の
差が大きくなっていることより、液体潤滑剤がバフ前で
は第2図に示したように島状に付着していたものが、バ
フを行うことにより第1図に示したような膜厚の均一な
連続膜となったものと考えられる。
The relationship between the surface roughness of the medium and the film thickness of the lubricating layer made of the liquid lubricant was examined for the medium prepared by buffing and the medium prepared in the same manner but not subjected to buffing. The measurement results are shown in the diagram of FIG. Here, the surface roughness is 1 from the depth of 10% of the relative load curve of the Abbott of the surface roughness of the medium.
The difference is calculated by subtracting the depth of%. Since the thickness of the lubricating layer is thicker in the buffed medium than in the non-buffed medium, and the larger the numerical value indicating the surface roughness, the larger the difference between the two thicknesses. Before the buff, the liquid lubricant adhered in an island shape as shown in Fig. 2, but by buffing it became a continuous film with a uniform film thickness as shown in Fig. 1. Conceivable.

〔発明の効果〕〔The invention's effect〕

以上のような本発明によれば、アモルファスカーボンか
らなる保護層上にフロロカーボン系液体潤滑剤を塗布
し、その表面に布を押し当てて2kg/cm2以上、3kg/cm2
下の面圧でバフを行うことにより潤滑層を形成するよう
にしたので、本発明により製造する薄膜磁気記録媒体の
潤滑層の膜厚を均一にして磁気ヘッドの吸着を防止する
と共に、CSS耐久性を高めることができる。
According to the present invention as described above, a fluorocarbon-based liquid lubricant was applied to the protective layer made of amorphous carbon, by pressing a cloth 2 kg / cm 2 or more on the surface thereof, 3 kg / cm 2 or less surface pressure Since the lubricating layer is formed by performing buffing, the film thickness of the lubricating layer of the thin film magnetic recording medium manufactured by the present invention can be made uniform to prevent adsorption of the magnetic head and enhance CSS durability. it can.

【図面の簡単な説明】[Brief description of drawings]

第1図はこの発明に係わるバフを行う製造方法による媒
体の潤滑層の要部部分断面図、第2図は従来の製造方法
による媒体の潤滑層の要部部分断面図、第3図はバフに
際して布を押しあてる面圧と吸着力テスト良否との関係
を示す関係図、第4図はバフ工程のあり,なしの媒体に
ついてCSSサイクルと摩擦係数との関係を示す線図、第
5図は同じくバフ工程のあり,なしの媒体について、表
面粗さと潤滑層膜厚との関係を示す線図である。 1……保護層、2……液体潤滑剤。
FIG. 1 is a partial sectional view of an essential part of a lubricating layer of a medium according to a manufacturing method for buffing according to the present invention, FIG. 2 is a partial sectional view of an essential part of a lubricating layer of a medium according to a conventional manufacturing method, and FIG. Fig. 4 is a diagram showing the relationship between the contact pressure of the cloth and the quality of the suction force test. Fig. 4 is a diagram showing the relationship between the CSS cycle and the coefficient of friction for media with and without the buffing process. FIG. 5 is a diagram showing the relationship between the surface roughness and the thickness of the lubricating layer for media with and without a buffing process. 1 ... Protective layer, 2 ... Liquid lubricant.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】強磁性金属薄膜からなる磁性層上に保護層
を形成し、この保護層上に液体潤滑剤を塗布し、その表
面に布を押し当ててバフを行うことにより潤滑層を形成
する薄膜磁気記録媒体の製造方法において、前記保護層
がアモルファスカーボンからなると共に、前記潤滑層が
フロロカーボン系潤滑剤からなり、前記バフを行うとき
の面圧が2kg/cm2以上、3kg/cm2以下であることを特徴と
する薄膜磁気記録媒体の製造方法。
1. A lubricating layer is formed by forming a protective layer on a magnetic layer made of a ferromagnetic metal thin film, applying a liquid lubricant on the protective layer, and pressing a cloth against the surface to buff the surface. In the method for producing a thin film magnetic recording medium, the protective layer is made of amorphous carbon, the lubricating layer is made of a fluorocarbon lubricant, and the surface pressure when performing the buffing is 2 kg / cm 2 or more, 3 kg / cm 2 A method of manufacturing a thin film magnetic recording medium, characterized in that:
JP63194912A 1988-08-04 1988-08-04 Method of manufacturing thin film magnetic recording medium Expired - Lifetime JPH0758545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63194912A JPH0758545B2 (en) 1988-08-04 1988-08-04 Method of manufacturing thin film magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63194912A JPH0758545B2 (en) 1988-08-04 1988-08-04 Method of manufacturing thin film magnetic recording medium

Publications (2)

Publication Number Publication Date
JPH0244519A JPH0244519A (en) 1990-02-14
JPH0758545B2 true JPH0758545B2 (en) 1995-06-21

Family

ID=16332407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63194912A Expired - Lifetime JPH0758545B2 (en) 1988-08-04 1988-08-04 Method of manufacturing thin film magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0758545B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0283823A (en) * 1988-09-19 1990-03-23 Fujitsu Ltd Production of magnetic disk medium
JP4238341B2 (en) 2003-04-23 2009-03-18 富士電機デバイステクノロジー株式会社 Method and apparatus for manufacturing magnetic recording medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6383921A (en) * 1986-09-29 1988-04-14 Fuji Photo Film Co Ltd Production of magnetic recording medium

Also Published As

Publication number Publication date
JPH0244519A (en) 1990-02-14

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