JPH0535567B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to an apparatus for manufacturing semiconductor devices such as LSI and VLSI. The present invention relates to semiconductor manufacturing equipment that can be classified in relation to work units and displayed appropriately.

[Background of the Invention] As the degree of integration of semiconductor integrated circuits increases, efforts are being made to improve the functionality and performance of equipment for manufacturing semiconductor integrated circuits. As these devices become more sophisticated and performant, the parameters for operating these types of devices have also increased. For example, in a step-and-repeat projection exposure apparatus, the number of such parameters may range from tens to even hundreds.

Therefore, in such a device, it is necessary to check a huge number of parameters as described above in order to confirm the setting status of the parameters when necessary, such as when changing the mask process or lot.
This is no longer even possible for operators who are primarily assigned to perform routine start and stop operations on semiconductor manufacturing equipment. Therefore, an apparatus has been proposed in which optimal values of parameters are stored for each work unit, such as a mask process, and when the work is decided, the stored parameter values are set all at once. However, even in this case, the focus position, exposure time, etc. are likely to change depending on the atmosphere, time, etc., and there are cases where they must be changed. In a conventional device, if you want to change some of the parameters, you have to search for the desired one from among the hundreds of parameters mentioned above using a list, etc., and key in the code name of that parameter. After identifying it, I changed the parameters and ended up missearching or inputting the code name incorrectly. That is, the work of changing parameters in the conventional apparatus is extremely difficult for the operator, and there is a high risk of erroneous operation and defective semiconductor products.

[Object of the Invention] In view of the above-mentioned problems of the conventional method, the present invention enables operation parameters to be selectively displayed according to the unit of work, and allows the operator to extremely easily check and change the parameters before starting operation. An object of the present invention is to provide a semiconductor manufacturing apparatus that can reduce erroneous operations caused by incorrect parameters.

[Description of Examples] Examples of the present invention will be described below with reference to the drawings.

FIG. 1 shows the appearance of a projection exposure apparatus according to an embodiment of the present invention. In the figure, numeral 1 denotes a mask having an integrated circuit pattern, and also includes mask alignment marks and mask-wafer alignment marks. 2 is a mask stage that holds mask 1 and moves mask 1 within the plane (XY direction)
and the rotational direction (θ direction). 3 is a reduction projection lens, 4 is a wafer provided with a photosensitive layer, and is provided with a mask/wafer alignment mark and a television/wafer alignment mark. 5
is the wafer stage. The wafer stage 5 holds the wafer 4 and moves it in the plane and in the rotational direction, and also moves between the wafer printing position (within the projection field of view) and the television/wafer alignment position. 6 is an objective lens of a detection device for television/wafer alignment, and 7 is an image pickup tube (or fixed image pickup element). A binocular unit 9 is useful for observing the surface of the wafer 4 through the projection lens 3. 10 is an upper unit housing an illumination optical system and a detection device for mask/wafer alignment. 11 is a monitor receiver (console
CRT), 12 is a keyboard for inputting various operation commands and parameters in the device.

FIG. 2 shows the electrical circuit configuration of the device of FIG.

In the figure, numeral 21 denotes a main body CPU which controls the entire apparatus, and is composed of a central processing unit such as a microcomputer or a minicomputer. 22
23 is an alignment detection system; 24 is a reticle stage drive device; 25 is a wafer stage drive device;
is a lighting system, 26 is a shutter drive device, 27 is a focus detection system, 28 is a Z drive device, and these are:
It is controlled by the main body CPU 21. 29 is a conveyance system.

30 is the console unit, and the main CPU 21
This is for giving various commands and parameters related to the operation of this exposure apparatus. 31 is a console CPU, and 32 is an external memory for storing parameters and the like. Note that the CRT 11 and keyboard 12 are the same as those shown in FIG.

In the device of this embodiment, the work units are hierarchically divided into work for each type of semiconductor product, work for each process, and work for each shot. ) are hierarchically associated with these work units.

For example, (top) Operation parameters determined by product type (related to layout) Step size, number of rows and columns, etc. (middle) Operation parameters determined by process (related to process) Mode (first mask) Whether or not, if it is after the second mask, the alignment method is
(TTL die-by-die or TTL global), reticle number, alignment mark position, TV pre-alignment position, etc. (bottom) Operating parameters related to shot
This can be achieved by classifying the problem such as whether the TV pre-alignment mark is burned in or not.

FIG. 7 shows this hierarchization. In other words,
Each parameter is classified as described above, and parameters related to product types are stored in layout files 1, 2,...
Parameters related to processes are stored in process files 1, 2, . . . and parameters related to shots are stored in shot files 1, 2, .

Next, the operation of the apparatus of this embodiment will be explained with reference to the flowchart in FIG. 3 and the display screen examples in FIGS. 4 and 5.

With this device, first, multiple files with various operating parameter settings are created for each layer, and then one job is created by selecting and joining files from each layer. do. The flowchart in FIG. 3 shows job creation processing in the apparatus of this embodiment.

The device shown in FIG. 1 enters a command input standby state, for example, when initialization after power-on is completed. In other words, the console CPU 31 waits for a key operation on the keyboard 12, and the main body CPU 21 waits for a key operation on the keyboard 12.
is in a state of waiting for communication from the console CPU 31. When a command for creating a job (for example, JOB) is input from the keyboard 12 in this state, the following job creation process is started under the control of the console CPU 31.

Referring to FIG. 3, in step 50, a file creation mode (F/G) is set on the CRT 11 (not shown).
Select either file link mode (F/L) or job creation end mode (END).
Displays a prompt message prompting you to input it. Then, the selected mode is determined based on input data from the keyboard 12.

If the file creation mode (F/G) is selected in step 50, the process advances to step 51. In step 51, the screen display of the CRT 11 is switched to that shown in FIG. (dotted line section 43 in Figure 4a),
Furthermore, based on the data (or data string) input after the line feed key is pressed on the keyboard 12 and before the line feed key is pressed, the CRT 11
Items displayed on the screen (1. Layout file, 2. Process file, 3. Short file)
It is determined whether the file creation mode or the file creation end mode of any hierarchy indicated by is selected. Here, each mode is selected by keying in either the number 1 to 3 attached to the above item or E indicating the end.

If 2 is keyed in at step 51 and the process file creation mode is selected, the process advances to step 52. In step 52, a prompt message is displayed on the CRT 11 to prompt the user to input the process file name. When a file name is input from the keyboard 12, the files stored in the external memory 32 are searched and the corresponding process file is read out (step 53).Furthermore, in step 54, a password (P/W) is assigned to the file. ) is attached. If a password has been assigned, the password input process from step 60 described below is executed, and if no password has been assigned, the process directly proceeds to step 55. It should be noted that if the file with the file name input by key in step 53 is not stored in the external memory 32, this means that a new process file is to be created, so the process directly proceeds to step 55 as in the case without a password.

In step 55, as shown in FIG. 4b, the process file creation mode is displayed, items to be changed or set are displayed, and a prompt is displayed to indicate that one of the items should be selected by number. . When any item number is selected in accordance with this display, a prompt message prompting the user to input the relevant data for that item is displayed as shown in FIG. Then, based on this data, the process of changing or creating a file (step 57) or changing or setting a password (step 58) is executed, and then the process returns to step 55. Furthermore, if "E" is input from the keyboard 12 in response to the display at step 55, the process file creation mode is ended and the process returns to step 51.

When 1 or 3 is entered by the key in step 51, processing in the layout file creation mode or the shortcut file creation mode is executed according to the key entry. '' is changed to ``Layout'' or ``Shot'' and each display and input item is changed to one corresponding to each hierarchy.

If the file link mode (F/L) is selected in step 50, the process advances to step 71. In step 71, a prompt message is displayed on the CRT 11 to prompt the user to input the job file name. Then, when a file name is input from the keyboard 12 (step 72), the files stored in the external memory 32 are searched, the corresponding job file is read out, and a password (P/W) is entered in the file in step 73. Determine whether or not the mark is attached. If a password has been assigned, the password input process from step 60 to be described later is executed, and if no password has been assigned, the process directly proceeds to step 74. It should be noted that if the file with the key-input file name is not stored in the external memory 32 in step 74, this means that a new job file is to be created, so the process directly proceeds to step 74 as in the case without a password.

In step 74, the CRT 11 displays the fact that it is in file link (job file creation) mode and the contents of the job file read from the external memory 32, and also displays a prompt to select the item to be changed or set by number. (Figure 5a). When any item number is selected in accordance with this display, a prompt message prompting the user to input the corresponding data for that item is displayed as shown in FIG. This data can then be used to modify or create a file (step 76) or change or set a password (step 76).
77), return to step 74. Further, if "E" is input from the keyboard 12 in response to the display at step 74, the file link mode is ended and the process returns to step 50.

In each of the file creation processes described above, if a password has been attached to the file (step 54 or 73), the process moves to step 60, which is password input processing. In this password input process, first, in step 61, a prompt message is displayed on the CRT 11 to prompt the user to input a password. When a password is input from the keyboard 12 (step 62), it is compared with the password read in the previous step (step 63). If they match, this password input process is terminated and the process returns to the original routine (step 55 or 74). On the other hand, if they do not match, an error is displayed (step 64), and then the process proceeds to step 65. In step 65, the number of times the passwords do not match is counted, and if the number of times the passwords do not match is less than three, the process returns to step 61 and waits for the password to be re-entered. On the other hand, if the password does not match for the third time in step 65, the process advances to step 66, displays an error, cancels the current file creation mode, and returns to step 50.

When accessing a file with a password registered in this way, you are required to enter the password, and access to the file is prohibited unless the entered password matches the registered password. It is possible to prevent an accident in which the contents are rewritten without the user's knowledge, and when the file is used, the device operates unexpectedly and product defects occur.

FIG. 6 shows the process of executing a step-and-repeat exposure operation, which is the main operation of the apparatus, using the file created as described above.

In the above command input waiting state, when a start (main operation start) command and the job file name used in the main operation are input from the keyboard 12 (step 81), the console CPU 2
1 searches the files stored in the external memory 32, reads out the corresponding job file, and further determines whether a password (P/W) is attached to the file (step 82). if,
If a password has been assigned, wait until a password that matches the password of the job file you are currently trying to use is entered from the keyboard 12 (steps 83 and 84); on the other hand, if no password has been assigned, proceed to step 85. Proceed to. In step 85, predetermined operating parameters are selected from the contents of the job file and displayed on the CRT.
Displayed on 12. The operating parameters displayed here are focus position (FOCUS) and exposure time (EX.
Displays items that are likely to be changed by the operator, such as TIME). After this, change the operation parameters as necessary (mode selection key input C), etc., and confirm the start of the main operation in the state of step 85 (same Y).
Then the main operation will start. If the main operation is canceled (N) in step 85, the device returns to the command waiting state. In this way, if a password is attached to the job file to be used at startup, the operation cannot be started unless the password is entered on the keyboard 12, so the operator may mistakenly use a job file other than the one specified. This and the occurrence of defects due to this can be prevented.

[Effects of the Invention] As described above, according to the present invention, operating parameters can be made to correspond to work units that have many opportunities to be set, such as those related to types of semiconductor products, those related to processes, and those related to shots. Since the parameters can be classified and displayed as desired, confirmation and modification of operating parameters (particularly confirmation and modification at the start of main operation), etc. are extremely simple.

[Brief explanation of the drawing]

1 is an external perspective view of a projection exposure apparatus according to an embodiment of the present invention, FIG. 2 is an electric circuit configuration diagram of the apparatus shown in FIG. 1, and FIGS. 3 and 6 are operation of the apparatus shown in FIG. 1. Flowcharts 4 and 5 are diagrams showing examples of CRT display screens in the device shown in FIG. 1, and FIG. 7 is a flowchart for explaining the operation parameter hierarchy in the device shown in FIG. It is a diagram. 11: CRT for monitor, 12: Keyboard, 2
1: Main CPU, 31: Console CPU, 32:
external memory.

Claims (1)

[Scope of Claims] 1. In a semiconductor manufacturing device that operates in accordance with a large number of operating parameters, work units in the device are classified into at least two or more hierarchies from a higher level concept to a lower level concept in terms of size, and the operating parameters are storage means for grouping and pre-storing the groups corresponding to each of these hierarchies, work unit designation means, and means for reading out and displaying a group of operating parameters corresponding to the designated work unit from the storage means. A semiconductor manufacturing device characterized by: 2. The semiconductor manufacturing apparatus according to claim 1, wherein the operating parameters are grouped into one of those related to the type of semiconductor product, those related to the process, and those related to the shot. 3. The semiconductor manufacturing apparatus according to claim 1, wherein the storage means selectively stores only specific parameters among the operating parameters that are changed relatively frequently in daily operations. 4. The semiconductor manufacturing apparatus according to claim 3, wherein the operation is a step-and-repeat exposure operation, and the specific parameters are an exposure time and a focus position.