JPH0535373Y2 - - Google Patents

Info

Publication number
JPH0535373Y2
JPH0535373Y2 JP16056888U JP16056888U JPH0535373Y2 JP H0535373 Y2 JPH0535373 Y2 JP H0535373Y2 JP 16056888 U JP16056888 U JP 16056888U JP 16056888 U JP16056888 U JP 16056888U JP H0535373 Y2 JPH0535373 Y2 JP H0535373Y2
Authority
JP
Japan
Prior art keywords
base
movable
movable base
motor
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16056888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0281516U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16056888U priority Critical patent/JPH0535373Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0281516U publication Critical patent/JPH0281516U/ja
Application granted granted Critical
Publication of JPH0535373Y2 publication Critical patent/JPH0535373Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Positioning Apparatuses (AREA)
JP16056888U 1988-12-09 1988-12-09 Expired - Lifetime JPH0535373Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0281516U JPH0281516U (enrdf_load_stackoverflow) 1990-06-22
JPH0535373Y2 true JPH0535373Y2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=31442745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16056888U Expired - Lifetime JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0535373Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0281516U (enrdf_load_stackoverflow) 1990-06-22

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