JPH0281516U - - Google Patents

Info

Publication number
JPH0281516U
JPH0281516U JP16056888U JP16056888U JPH0281516U JP H0281516 U JPH0281516 U JP H0281516U JP 16056888 U JP16056888 U JP 16056888U JP 16056888 U JP16056888 U JP 16056888U JP H0281516 U JPH0281516 U JP H0281516U
Authority
JP
Japan
Prior art keywords
base
movable
movable base
respect
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16056888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535373Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16056888U priority Critical patent/JPH0535373Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0281516U publication Critical patent/JPH0281516U/ja
Application granted granted Critical
Publication of JPH0535373Y2 publication Critical patent/JPH0535373Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Positioning Apparatuses (AREA)
JP16056888U 1988-12-09 1988-12-09 Expired - Lifetime JPH0535373Y2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16056888U JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0281516U true JPH0281516U (enrdf_load_stackoverflow) 1990-06-22
JPH0535373Y2 JPH0535373Y2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=31442745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16056888U Expired - Lifetime JPH0535373Y2 (enrdf_load_stackoverflow) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0535373Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0535373Y2 (enrdf_load_stackoverflow) 1993-09-08

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