JPH0532927Y2 - - Google Patents
Info
- Publication number
- JPH0532927Y2 JPH0532927Y2 JP7368586U JP7368586U JPH0532927Y2 JP H0532927 Y2 JPH0532927 Y2 JP H0532927Y2 JP 7368586 U JP7368586 U JP 7368586U JP 7368586 U JP7368586 U JP 7368586U JP H0532927 Y2 JPH0532927 Y2 JP H0532927Y2
- Authority
- JP
- Japan
- Prior art keywords
- correction
- focus correction
- pole piece
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7368586U JPH0532927Y2 (cs) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7368586U JPH0532927Y2 (cs) | 1986-05-16 | 1986-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62186362U JPS62186362U (cs) | 1987-11-27 |
| JPH0532927Y2 true JPH0532927Y2 (cs) | 1993-08-23 |
Family
ID=30918236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7368586U Expired - Lifetime JPH0532927Y2 (cs) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532927Y2 (cs) |
-
1986
- 1986-05-16 JP JP7368586U patent/JPH0532927Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62186362U (cs) | 1987-11-27 |
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