JPH0532902B2 - - Google Patents
Info
- Publication number
- JPH0532902B2 JPH0532902B2 JP63157701A JP15770188A JPH0532902B2 JP H0532902 B2 JPH0532902 B2 JP H0532902B2 JP 63157701 A JP63157701 A JP 63157701A JP 15770188 A JP15770188 A JP 15770188A JP H0532902 B2 JPH0532902 B2 JP H0532902B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heating section
- heating
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 103
- 239000007789 gas Substances 0.000 claims description 43
- 230000005855 radiation Effects 0.000 claims description 19
- 238000001947 vapour-phase growth Methods 0.000 claims description 19
- 239000012495 reaction gas Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 58
- 238000010926 purge Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15770188A JPH027419A (ja) | 1988-06-24 | 1988-06-24 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15770188A JPH027419A (ja) | 1988-06-24 | 1988-06-24 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH027419A JPH027419A (ja) | 1990-01-11 |
| JPH0532902B2 true JPH0532902B2 (ko) | 1993-05-18 |
Family
ID=15655489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15770188A Granted JPH027419A (ja) | 1988-06-24 | 1988-06-24 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027419A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3474602B2 (ja) * | 1993-05-07 | 2003-12-08 | 住友電気工業株式会社 | 超電導導体 |
| JP3501828B2 (ja) * | 1993-10-21 | 2004-03-02 | 住友電気工業株式会社 | 酸化物超電導導体の製造方法 |
| JPH1027759A (ja) * | 1996-07-11 | 1998-01-27 | Seiko Epson Corp | 熱処理装置、減圧ｃｖｄ装置、および薄膜装置の製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5130477A (ja) * | 1974-09-09 | 1976-03-15 | Kokusai Electric Co Ltd | Kisoseichosochi |
| JPS5319181A (en) * | 1976-08-06 | 1978-02-22 | Hitachi Ltd | Low pressure reaction apparatus |
| JPS5842225A (ja) * | 1981-09-04 | 1983-03-11 | Kokusai Electric Co Ltd | 外熱形の横型半導体気相成長装置 |
| JPS5950093A (ja) * | 1982-09-10 | 1984-03-22 | Toshiba Mach Co Ltd | 拡散炉型減圧気相成長装置 |
-
1988
- 1988-06-24 JP JP15770188A patent/JPH027419A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5130477A (ja) * | 1974-09-09 | 1976-03-15 | Kokusai Electric Co Ltd | Kisoseichosochi |
| JPS5319181A (en) * | 1976-08-06 | 1978-02-22 | Hitachi Ltd | Low pressure reaction apparatus |
| JPS5842225A (ja) * | 1981-09-04 | 1983-03-11 | Kokusai Electric Co Ltd | 外熱形の横型半導体気相成長装置 |
| JPS5950093A (ja) * | 1982-09-10 | 1984-03-22 | Toshiba Mach Co Ltd | 拡散炉型減圧気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027419A (ja) | 1990-01-11 |
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