JPH05326Y2 - - Google Patents
Info
- Publication number
- JPH05326Y2 JPH05326Y2 JP1987048742U JP4874287U JPH05326Y2 JP H05326 Y2 JPH05326 Y2 JP H05326Y2 JP 1987048742 U JP1987048742 U JP 1987048742U JP 4874287 U JP4874287 U JP 4874287U JP H05326 Y2 JPH05326 Y2 JP H05326Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- adhesive sheet
- main body
- breaking
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 75
- 239000000853 adhesive Substances 0.000 claims description 21
- 230000001070 adhesive effect Effects 0.000 claims description 21
- 235000012431 wafers Nutrition 0.000 description 69
- 238000000034 method Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048742U JPH05326Y2 (US08063081-20111122-C00115.png) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048742U JPH05326Y2 (US08063081-20111122-C00115.png) | 1987-03-31 | 1987-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63156709U JPS63156709U (US08063081-20111122-C00115.png) | 1988-10-14 |
| JPH05326Y2 true JPH05326Y2 (US08063081-20111122-C00115.png) | 1993-01-07 |
Family
ID=30870559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048742U Expired - Lifetime JPH05326Y2 (US08063081-20111122-C00115.png) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05326Y2 (US08063081-20111122-C00115.png) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028748A (US08063081-20111122-C00115.png) * | 1973-07-13 | 1975-03-24 | ||
| JPS5147564A (en) * | 1974-10-23 | 1976-04-23 | Daido Steel Co Ltd | Kinzokufunmatsuno seizohoho |
| JPS5147565A (ja) * | 1974-10-23 | 1976-04-23 | Chukyo Electric Co | Hariganechokusensochi |
-
1987
- 1987-03-31 JP JP1987048742U patent/JPH05326Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028748A (US08063081-20111122-C00115.png) * | 1973-07-13 | 1975-03-24 | ||
| JPS5147564A (en) * | 1974-10-23 | 1976-04-23 | Daido Steel Co Ltd | Kinzokufunmatsuno seizohoho |
| JPS5147565A (ja) * | 1974-10-23 | 1976-04-23 | Chukyo Electric Co | Hariganechokusensochi |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63156709U (US08063081-20111122-C00115.png) | 1988-10-14 |
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