JPH0531937B2 - - Google Patents
Info
- Publication number
- JPH0531937B2 JPH0531937B2 JP31489186A JP31489186A JPH0531937B2 JP H0531937 B2 JPH0531937 B2 JP H0531937B2 JP 31489186 A JP31489186 A JP 31489186A JP 31489186 A JP31489186 A JP 31489186A JP H0531937 B2 JPH0531937 B2 JP H0531937B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- color
- signals
- inspected
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 18
- 238000003384 imaging method Methods 0.000 claims description 15
- 239000003086 colorant Substances 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31489186A JPS63159738A (ja) | 1986-12-23 | 1986-12-23 | カラ−撮像によるパタ−ン検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31489186A JPS63159738A (ja) | 1986-12-23 | 1986-12-23 | カラ−撮像によるパタ−ン検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63159738A JPS63159738A (ja) | 1988-07-02 |
| JPH0531937B2 true JPH0531937B2 (zh) | 1993-05-13 |
Family
ID=18058869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31489186A Granted JPS63159738A (ja) | 1986-12-23 | 1986-12-23 | カラ−撮像によるパタ−ン検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159738A (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019124640A (ja) * | 2018-01-18 | 2019-07-25 | 新電元工業株式会社 | 外観検査装置および外観検査方法 |
-
1986
- 1986-12-23 JP JP31489186A patent/JPS63159738A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63159738A (ja) | 1988-07-02 |
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