JPH053144B2 - - Google Patents

Info

Publication number
JPH053144B2
JPH053144B2 JP58125720A JP12572083A JPH053144B2 JP H053144 B2 JPH053144 B2 JP H053144B2 JP 58125720 A JP58125720 A JP 58125720A JP 12572083 A JP12572083 A JP 12572083A JP H053144 B2 JPH053144 B2 JP H053144B2
Authority
JP
Japan
Prior art keywords
layer
region
semiconductor
forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58125720A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5925266A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP58125720A priority Critical patent/JPS5925266A/ja
Publication of JPS5925266A publication Critical patent/JPS5925266A/ja
Publication of JPH053144B2 publication Critical patent/JPH053144B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP58125720A 1983-07-11 1983-07-11 半導体装置作製方法 Granted JPS5925266A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58125720A JPS5925266A (ja) 1983-07-11 1983-07-11 半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58125720A JPS5925266A (ja) 1983-07-11 1983-07-11 半導体装置作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55141318A Division JPS5764967A (en) 1980-10-08 1980-10-08 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5925266A JPS5925266A (ja) 1984-02-09
JPH053144B2 true JPH053144B2 (enrdf_load_stackoverflow) 1993-01-14

Family

ID=14917087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58125720A Granted JPS5925266A (ja) 1983-07-11 1983-07-11 半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPS5925266A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003052499A (ja) * 2001-08-09 2003-02-25 Okamura Corp 陳列棚等のフレーム構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764965A (en) * 1980-10-08 1982-04-20 Semiconductor Energy Lab Co Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS5925266A (ja) 1984-02-09

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