JPH0237106B2 - - Google Patents

Info

Publication number
JPH0237106B2
JPH0237106B2 JP55141316A JP14131680A JPH0237106B2 JP H0237106 B2 JPH0237106 B2 JP H0237106B2 JP 55141316 A JP55141316 A JP 55141316A JP 14131680 A JP14131680 A JP 14131680A JP H0237106 B2 JPH0237106 B2 JP H0237106B2
Authority
JP
Japan
Prior art keywords
region
capacitor
substrate
type
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55141316A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5764965A (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP55141316A priority Critical patent/JPS5764965A/ja
Publication of JPS5764965A publication Critical patent/JPS5764965A/ja
Priority to JP2064881A priority patent/JPH03136275A/ja
Publication of JPH0237106B2 publication Critical patent/JPH0237106B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP55141316A 1980-10-08 1980-10-08 Semiconductor device Granted JPS5764965A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP55141316A JPS5764965A (en) 1980-10-08 1980-10-08 Semiconductor device
JP2064881A JPH03136275A (ja) 1980-10-08 1990-03-15 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55141316A JPS5764965A (en) 1980-10-08 1980-10-08 Semiconductor device

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP58125719A Division JPS5925274A (ja) 1983-07-11 1983-07-11 半導体装置作製方法
JP2064883A Division JPH02290062A (ja) 1990-03-15 1990-03-15 半導体装置
JP2064882A Division JPH02290061A (ja) 1990-03-15 1990-03-15 半導体装置の作製方法
JP2064881A Division JPH03136275A (ja) 1980-10-08 1990-03-15 半導体装置

Publications (2)

Publication Number Publication Date
JPS5764965A JPS5764965A (en) 1982-04-20
JPH0237106B2 true JPH0237106B2 (enrdf_load_stackoverflow) 1990-08-22

Family

ID=15289066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55141316A Granted JPS5764965A (en) 1980-10-08 1980-10-08 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5764965A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925266A (ja) * 1983-07-11 1984-02-09 Semiconductor Energy Lab Co Ltd 半導体装置作製方法
JPS5925274A (ja) * 1983-07-11 1984-02-09 Semiconductor Energy Lab Co Ltd 半導体装置作製方法
JPS61194875A (ja) * 1985-02-25 1986-08-29 Toshiba Corp 情報の再書換え可能な読み出し専用半導体メモリ及びその製造方法
JPH02290061A (ja) * 1990-03-15 1990-11-29 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
JPH02290062A (ja) * 1990-03-15 1990-11-29 Semiconductor Energy Lab Co Ltd 半導体装置

Also Published As

Publication number Publication date
JPS5764965A (en) 1982-04-20

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