JPH0530355Y2 - - Google Patents

Info

Publication number
JPH0530355Y2
JPH0530355Y2 JP7640086U JP7640086U JPH0530355Y2 JP H0530355 Y2 JPH0530355 Y2 JP H0530355Y2 JP 7640086 U JP7640086 U JP 7640086U JP 7640086 U JP7640086 U JP 7640086U JP H0530355 Y2 JPH0530355 Y2 JP H0530355Y2
Authority
JP
Japan
Prior art keywords
reaction tube
quartz reaction
door flange
rings
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7640086U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188135U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7640086U priority Critical patent/JPH0530355Y2/ja
Publication of JPS62188135U publication Critical patent/JPS62188135U/ja
Application granted granted Critical
Publication of JPH0530355Y2 publication Critical patent/JPH0530355Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7640086U 1986-05-21 1986-05-21 Expired - Lifetime JPH0530355Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7640086U JPH0530355Y2 (enExample) 1986-05-21 1986-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7640086U JPH0530355Y2 (enExample) 1986-05-21 1986-05-21

Publications (2)

Publication Number Publication Date
JPS62188135U JPS62188135U (enExample) 1987-11-30
JPH0530355Y2 true JPH0530355Y2 (enExample) 1993-08-03

Family

ID=30923441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7640086U Expired - Lifetime JPH0530355Y2 (enExample) 1986-05-21 1986-05-21

Country Status (1)

Country Link
JP (1) JPH0530355Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023127054A1 (ja) * 2021-12-27 2023-07-06 株式会社Kokusai Electric 漏洩検知装置、半導体装置の製造方法、基板処理方法およびプログラム

Also Published As

Publication number Publication date
JPS62188135U (enExample) 1987-11-30

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