JPH0530348Y2 - - Google Patents

Info

Publication number
JPH0530348Y2
JPH0530348Y2 JP1988005954U JP595488U JPH0530348Y2 JP H0530348 Y2 JPH0530348 Y2 JP H0530348Y2 JP 1988005954 U JP1988005954 U JP 1988005954U JP 595488 U JP595488 U JP 595488U JP H0530348 Y2 JPH0530348 Y2 JP H0530348Y2
Authority
JP
Japan
Prior art keywords
wafer
resist
light
exposure
unnecessary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988005954U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01112040U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988005954U priority Critical patent/JPH0530348Y2/ja
Publication of JPH01112040U publication Critical patent/JPH01112040U/ja
Application granted granted Critical
Publication of JPH0530348Y2 publication Critical patent/JPH0530348Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988005954U 1988-01-22 1988-01-22 Expired - Lifetime JPH0530348Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988005954U JPH0530348Y2 (enExample) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988005954U JPH0530348Y2 (enExample) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112040U JPH01112040U (enExample) 1989-07-27
JPH0530348Y2 true JPH0530348Y2 (enExample) 1993-08-03

Family

ID=31209778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988005954U Expired - Lifetime JPH0530348Y2 (enExample) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0530348Y2 (enExample)

Also Published As

Publication number Publication date
JPH01112040U (enExample) 1989-07-27

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