JPH01112040U - - Google Patents
Info
- Publication number
- JPH01112040U JPH01112040U JP1988005954U JP595488U JPH01112040U JP H01112040 U JPH01112040 U JP H01112040U JP 1988005954 U JP1988005954 U JP 1988005954U JP 595488 U JP595488 U JP 595488U JP H01112040 U JPH01112040 U JP H01112040U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- wafer
- light irradiation
- transports
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988005954U JPH0530348Y2 (enExample) | 1988-01-22 | 1988-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988005954U JPH0530348Y2 (enExample) | 1988-01-22 | 1988-01-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01112040U true JPH01112040U (enExample) | 1989-07-27 |
| JPH0530348Y2 JPH0530348Y2 (enExample) | 1993-08-03 |
Family
ID=31209778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988005954U Expired - Lifetime JPH0530348Y2 (enExample) | 1988-01-22 | 1988-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530348Y2 (enExample) |
-
1988
- 1988-01-22 JP JP1988005954U patent/JPH0530348Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530348Y2 (enExample) | 1993-08-03 |