JPH03125344U - - Google Patents
Info
- Publication number
- JPH03125344U JPH03125344U JP3535890U JP3535890U JPH03125344U JP H03125344 U JPH03125344 U JP H03125344U JP 3535890 U JP3535890 U JP 3535890U JP 3535890 U JP3535890 U JP 3535890U JP H03125344 U JPH03125344 U JP H03125344U
- Authority
- JP
- Japan
- Prior art keywords
- light amount
- light
- detected
- detection means
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 1
Landscapes
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535890U JPH03125344U (enExample) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535890U JPH03125344U (enExample) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125344U true JPH03125344U (enExample) | 1991-12-18 |
Family
ID=31540645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3535890U Pending JPH03125344U (enExample) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125344U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011147202A (ja) * | 2010-01-12 | 2011-07-28 | Tdk-Lambda Corp | スイッチング電源装置 |
| WO2012099169A1 (ja) * | 2011-01-19 | 2012-07-26 | 株式会社 テクノバ | 非接触給電システム |
-
1990
- 1990-03-30 JP JP3535890U patent/JPH03125344U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011147202A (ja) * | 2010-01-12 | 2011-07-28 | Tdk-Lambda Corp | スイッチング電源装置 |
| WO2012099169A1 (ja) * | 2011-01-19 | 2012-07-26 | 株式会社 テクノバ | 非接触給電システム |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03125344U (enExample) | ||
| JPS5928608A (ja) | 溶接線検出装置 | |
| JPH05259029A (ja) | 位置検出装置 | |
| JPH0161610U (enExample) | ||
| JP3200654B2 (ja) | 投影露光装置 | |
| JPH01181032U (enExample) | ||
| JPH0189734U (enExample) | ||
| JPS62260118A (ja) | 投影露光装置 | |
| JPS62190368U (enExample) | ||
| JP2979625B2 (ja) | 縮小投影露光装置の露光条件確認方法 | |
| JPH0381278U (enExample) | ||
| JPH0356126U (enExample) | ||
| JPS63124021A (ja) | 画像投影装置 | |
| JPH0337554U (enExample) | ||
| JPH03130018U (enExample) | ||
| JPS6216950U (enExample) | ||
| JPS5816239A (ja) | フオトレジスト露光装置 | |
| JPS63174100U (enExample) | ||
| JPS6384934U (enExample) | ||
| JPH03140944A (ja) | 画像形成装置 | |
| JPS58138010U (ja) | 寸法測定装置 | |
| JPH0319320A (ja) | 露光装置及び露光方法 | |
| JPS63195625U (enExample) | ||
| JPS6311648U (enExample) | ||
| JPS58138008U (ja) | 寸法測定装置 |