JPH03125344U - - Google Patents
Info
- Publication number
- JPH03125344U JPH03125344U JP3535890U JP3535890U JPH03125344U JP H03125344 U JPH03125344 U JP H03125344U JP 3535890 U JP3535890 U JP 3535890U JP 3535890 U JP3535890 U JP 3535890U JP H03125344 U JPH03125344 U JP H03125344U
- Authority
- JP
- Japan
- Prior art keywords
- light amount
- light
- detected
- detection means
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 1
Description
第１図は本考案の一実施例に係る露光装置を示
す概略説明図、第２図イ及びロは本考案の露光装
置による光量の検出状態を示す説明図であり、同
図イは平面図を、同図ロは光量分布図である。第
３図イ及びロは本考案の露光装置による光量異常
の検出状態を示す説明図であり、同図イは平面図
を、同図ロは光量分布図である。第４図は従来の
露光装置の概略説明図、第５図は従来の露光装置
を構成するレチクル遮蔽機構の一例を示す一部破
断分解斜視図である。
１……光量検出手段、２……検出光量記憶部、
３……基準光量記憶部、４……光量比較手段、５
……インターロツク機構、１００……レチクル、
１０１……光源、１１０……レンズ系、１２３，
１２４……遮蔽板、Ｗ……半導体ウエハ、Ｐ……
パターン。
FIG. 1 is a schematic explanatory diagram showing an exposure apparatus according to an embodiment of the present invention, FIG. The figure B is a light amount distribution diagram. FIGS. 3A and 3B are explanatory diagrams showing the state of detection of abnormality in light amount by the exposure apparatus of the present invention; FIG. 3A is a plan view, and FIG. 3B is a light amount distribution diagram. FIG. 4 is a schematic explanatory diagram of a conventional exposure apparatus, and FIG. 5 is a partially cutaway exploded perspective view showing an example of a reticle shielding mechanism constituting the conventional exposure apparatus. 1... Light amount detection means, 2... Detected light amount storage section,
3...Reference light amount storage unit, 4...Light amount comparison means, 5
...Interlock mechanism, 100...Reticle,
101...Light source, 110...Lens system, 123,
124... Shielding plate, W... Semiconductor wafer, P...
pattern.
Claims (1)
させるレンズ系と、上記光源から照射される光路
の途中に配置され、上記半導体ウエハ上に露光す
るパターンを形成したレチクルと、上記レチクル
に形成された所定のパターンの周囲を透過する余
分な光を遮蔽する遮蔽板とを備えた露光装置にお
いて、 上記遮蔽板によつて遮蔽され、レチクルのパタ
ーンの周縁と遮蔽板とで遮蔽された部分との間に
照射される光量を検出する光量検出手段と、上記
光量検出手段で検出された光量を記憶する検出光
量記憶部と、 上記光量検出手段によつて検出された検出光量
を、予め検出されて基準光量記憶部に記憶された
基準光量と比較する光量比較手段と、 上記光量比較手段によつて不一致と判断される
と露光作業を停止させるインターロツク機構とを
有することを特徴とする露光装置。[Claims for Utility Model Registration] A lens system that focuses light emitted from a light source onto a semiconductor wafer, and a reticle that is placed in the middle of the optical path emitted from the light source and forms a pattern to be exposed on the semiconductor wafer. and a shielding plate for shielding excess light passing through the periphery of a predetermined pattern formed on the reticle, wherein the light is shielded by the shielding plate and that the periphery of the pattern on the reticle and the shielding plate are a light amount detection means for detecting the amount of light irradiated between the portion shielded by the light amount detection means; a detected light amount storage section for storing the amount of light detected by the light amount detection means; and a detection light amount detected by the light amount detection means. It has a light amount comparing means for comparing the light amount with a reference light amount detected in advance and stored in a reference light amount storage unit, and an interlock mechanism that stops the exposure operation when the light amount comparing means determines that there is a discrepancy. An exposure device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535890U JPH03125344U (en) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3535890U JPH03125344U (en) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125344U true JPH03125344U (en) | 1991-12-18 |
Family
ID=31540645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3535890U Pending JPH03125344U (en) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125344U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011147202A (en) * | 2010-01-12 | 2011-07-28 | Tdk-Lambda Corp | Switching power unit |
| WO2012099169A1 (en) * | 2011-01-19 | 2012-07-26 | 株式会社 テクノバ | Contactless power transfer system |
-
1990
- 1990-03-30 JP JP3535890U patent/JPH03125344U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011147202A (en) * | 2010-01-12 | 2011-07-28 | Tdk-Lambda Corp | Switching power unit |
| WO2012099169A1 (en) * | 2011-01-19 | 2012-07-26 | 株式会社 テクノバ | Contactless power transfer system |
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