JPH04240506A - Optical regulator of measuring device of dimension and using method thereof - Google Patents

Optical regulator of measuring device of dimension and using method thereof

Info

Publication number
JPH04240506A
JPH04240506A JP2527891A JP2527891A JPH04240506A JP H04240506 A JPH04240506 A JP H04240506A JP 2527891 A JP2527891 A JP 2527891A JP 2527891 A JP2527891 A JP 2527891A JP H04240506 A JPH04240506 A JP H04240506A
Authority
JP
Japan
Prior art keywords
light
slit
light receiving
section
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2527891A
Other languages
Japanese (ja)
Inventor
Yasumasa Sakai
酒井 泰誠
Tomiyoshi Yoshida
吉田 富省
Hiroaki Takimasa
宏章 滝政
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Priority to JP2527891A priority Critical patent/JPH04240506A/en
Publication of JPH04240506A publication Critical patent/JPH04240506A/en
Pending legal-status Critical Current

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  • Mounting And Adjusting Of Optical Elements (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To make it possible to conduct simply an operation of position alignment of the optical axis of a projected light beam emitted from a light projecting part with the center of a slit of a light sensing part in a transmission type device for measuring dimensions. CONSTITUTION:An optical regulator 4 is fitted to a light sensing part 2, and two openings 5a and 5b having equal opening areas are disposed to be symmetric linearly in respect to a line C passing through the center of a slit 3 and being perpendicular to the direction of the length of the slit 3. Next, a projected light beam beta is oscillated vertically, the openings 5a and 5b are closed one by one alternately and thereby regulation is made so that an output of the light sensing part be equal. Moreover, the projected light beam beta is oscillated laterally and regulation is made so that the output of the light sensing part be maximum.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、透過型寸法測定装置の
投光部と受光部の光学的な位置合わせを行なうために用
いられる光学調整器と、その光学調整器の使用方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical adjuster used for optically aligning a light emitting section and a light receiving section of a transmission type dimension measuring device, and a method of using the optical adjuster.

【0002】0002

【従来の技術】図4に透過型寸法測定装置の外観図を示
す。寸法測定装置は、投光部1と受光部2とからなり、
互いに向かい合わせに配置されている。投光部1内には
、半導体レーザや発光ダイオード(LED)、ランプ等
の発光源(図示せず)と発光源から放射された光を平行
光に変換するためのレンズ(図示せず)が内蔵されてい
る。また、受光部2の前面にはスリット3が開口されて
おり、内部にはスリット3から入射した光を受光して受
光量を検出するためのフォトダイオード(PD)、PD
アレイ、電荷結合素子(CCD)等の受光素子(図示せ
ず)が内蔵され、受光素子の中心とスリット3の中心と
は位置合わせされている。
2. Description of the Related Art FIG. 4 shows an external view of a transmission type dimension measuring device. The dimension measuring device consists of a light emitting part 1 and a light receiving part 2,
are placed opposite each other. Inside the light projection unit 1, there are a light emitting source (not shown) such as a semiconductor laser, a light emitting diode (LED), or a lamp, and a lens (not shown) for converting the light emitted from the light source into parallel light. Built-in. In addition, a slit 3 is opened in the front surface of the light receiving section 2, and a photodiode (PD) and a PD for receiving the light incident through the slit 3 and detecting the amount of light received are installed inside.
A light receiving element (not shown) such as an array or a charge-coupled device (CCD) is built in, and the center of the light receiving element and the center of the slit 3 are aligned.

【0003】しかして、この寸法測定装置では、投光部
1から出射された投光ビームを物体に照射させ、その不
透明物体による遮光状態、あるいはその半透明物体の透
過光量を受光部2で検知して物体の寸法を測定する。
[0003]In this dimension measuring device, the projecting beam emitted from the projecting section 1 is irradiated onto the object, and the receiving section 2 detects the state of light shielding by the opaque object or the amount of light transmitted through the translucent object. to measure the dimensions of an object.

【0004】上記のような透過型寸法測定装置において
は、投光部1から出射された投光ビームが受光部2のス
リット3全体に照射されるよう、予め投光部1と受光部
2の位置関係を調整する必要がある。特に、この調整作
業では、投光ビームの光軸αとスリット3の中心とを一
致させることが望ましい。
In the transmission type dimension measuring device as described above, the light projecting section 1 and the light receiving section 2 are arranged in advance so that the projection beam emitted from the light projecting section 1 is irradiated onto the entire slit 3 of the light receiving section 2. It is necessary to adjust the positional relationship. In particular, in this adjustment work, it is desirable to align the optical axis α of the projected beam with the center of the slit 3.

【0005】このため、従来にあっては、投光部1と受
光部2を対向させて配置し、受光部2の出力信号をモニ
ターしながら投光部1を動かして投光ビームを上下左右
の2方向に振らせ、受光部2からの出力値が最大となる
状態をもって調整完了とし、投光部1と受光部2を固定
していた。
For this reason, conventionally, the light emitter 1 and the light receiver 2 are arranged facing each other, and the light emitter 1 is moved while monitoring the output signal of the light receiver 2 to direct the emitted light beam vertically and horizontally. The adjustment was completed when the output value from the light receiving section 2 reached the maximum, and the light projecting section 1 and the light receiving section 2 were fixed.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記の
ようにして投光ビームの光軸とスリットの中心を位置合
わせする方法では、投光部を上下左右に移動させて受光
部の出力値が最大となる状態を決定するまでに長時間を
要し、調整作業に手間が掛かっていた。また、このよう
な調整方法では、受光部の出力値が最大となるようにセ
ットしても、投光ビームの光軸とスリットの中心が一致
した望ましい状態となっているかどうかはっきりしなか
った。
[Problem to be Solved by the Invention] However, in the above method of aligning the optical axis of the light emitting beam and the center of the slit, the output value of the light receiving part is maximized by moving the light emitter up, down, left and right. It took a long time to determine the state that would result, and the adjustment work was time-consuming. In addition, with such an adjustment method, even if the output value of the light receiving section is set to be the maximum, it is not clear whether the optical axis of the projected beam and the center of the slit are in the desired state of alignment.

【0007】本発明は、叙上の従来例の欠点に鑑みてな
されたものであり、その目的とするところは、透過型寸
法測定装置の投光ビームの光軸とスリットの中心を一致
させる作業を容易にするための光学調整器とその使用方
法を提供することにある。
The present invention has been made in view of the drawbacks of the conventional examples described above, and its purpose is to align the optical axis of the projected beam of a transmission type dimension measuring device with the center of the slit. An object of the present invention is to provide an optical adjuster and a method for using the same to facilitate the use of the optical adjuster.

【0008】[0008]

【課題を解決するための手段】本発明の寸法測定装置の
光学調整器は、投光部から投光ビームを物体に照射し、
この投光ビームを受光部のスリットに入射させると共に
その物体で遮蔽されることにより変化する受光量を受光
部で検知し、物体の寸法を測定する装置において投光ビ
ームの光軸とスリットの中心とを一致させるための光学
調整器であって、前記投光部から出射される投光ビーム
を遮断するマスク部と、マスク部にあけられた2つの開
口と、この2つの開口が前記受光部のスリットと一致す
るように、かつ両開口の位置がスリットの中心を通るス
リット幅方向の線に関して線対称となるように、マスク
部を受光部に位置決めする手段とからなることを特徴と
している。
[Means for Solving the Problems] The optical adjuster of the dimension measuring device of the present invention irradiates the object with a projection beam from the projection section,
The optical axis of the emitted beam and the center of the slit are used in a device that measures the dimensions of an object by making the emitted light beam enter a slit in the light receiving part and detecting the amount of received light that changes when it is blocked by the object. The optical adjuster includes a mask part that blocks the projected light beam emitted from the light projecting part, two openings formed in the mask part, and these two openings are arranged to match the light receiving part. It is characterized by comprising means for positioning the mask part on the light receiving part so that the mask part coincides with the slit, and the positions of both openings are axisymmetric with respect to a line in the slit width direction passing through the center of the slit.

【0009】本発明の光学調整器の使用方法は、投光部
から出射された投光ビームの光軸と受光部に開口された
スリットの中心とを一致させるための光学調整器の使用
方法であって、受光部にマスク部を取り付けてマスク部
の2つの開口をスリットに一致させると共に、両開口を
スリットの中心を通るスリット幅方向の線に関して線対
称となるように配置し、一方の開口だけを塞いだ時の受
光部出力と他方の開口だけを塞いだ時の受光部出力とが
等しくなるように投光部もしくは受光部を動かし、一方
の開口だけを塞いだ時の受光部出力と他方の開口だけを
塞いだ時の受光部出力とが等しい状態を保ちながら投光
部もしくは受光部を動かし、受光部出力が最大となる状
態に投光部と受光部を位置調整することを特徴としてい
る。
A method of using an optical adjuster according to the present invention is a method of using an optical adjuster for aligning the optical axis of a projected beam emitted from a light projecting section with the center of a slit opened in a light receiving section. A mask section is attached to the light receiving section, and the two openings of the mask section are aligned with the slit, and both openings are arranged so as to be symmetrical with respect to a line in the slit width direction passing through the center of the slit. Move the emitter or light receiver so that the output of the light receiver when only one aperture is blocked is equal to the output of the light receiver when only the other aperture is blocked, and compare the output of the light receiver when only one aperture is blocked. The feature is that the light emitter or light receiver is moved while maintaining the same state with the light receiver output when only the other opening is closed, and the positions of the light emitter and light receiver are adjusted so that the light receiver output is maximized. It is said that

【0010】0010

【作用】受光部に取り付けたマスク部の両開口をスリッ
トの中心を通るスリット幅方向の線に関して線対称とな
るように配置してあるので、一方の開口だけを塞いだ時
の受光部出力と他方の開口だけを塞いだ時の受光部出力
とが等しくなるようにすれば、投光ビームの光軸はスリ
ットの中心を通るスリット幅方向の線に一致する。さら
に、一方の開口だけを塞いだ時の受光部出力と他方の開
口だけを塞いだ時の受光部出力とが等しい状態を保ちな
がら投光部もしくは受光部を動かし、受光部出力が最大
となるようにすれば、投光ビームの光軸はスリットの中
心と一致する。
[Function] Since both openings of the mask attached to the light receiving section are arranged symmetrically with respect to the line in the slit width direction passing through the center of the slit, the output of the light receiving section when only one opening is closed is If the output of the light receiving section is made equal when only the other opening is closed, the optical axis of the projected light beam will coincide with a line passing through the center of the slit in the slit width direction. Furthermore, the output of the light receiving part is maximized by moving the light emitter or the light receiving part while keeping the output of the light receiving part when only one aperture is closed and the output of the light receiving part when only the other aperture is closed. If this is done, the optical axis of the projected beam will coincide with the center of the slit.

【0011】[0011]

【実施例】以下、本発明の実施例を添付図に基づいて詳
述する。 図1に本発明の一実施例の光学調整器4と受光部2とを
示す。受光部2は、角柱状の外形を有しており、前面に
は受光用のスリット3を開口されている。光学調整器4
は、角箱状の形状をしており、マスク部6aの外周に位
置決め用の外縁部6bが形成されている。すなわち、こ
の外縁部6bの内周寸法は、受光部2の外周寸法と等し
く形成されており、光学調整器4を受光部2の前部に被
せるようにして取り付けると、光学調整器4は外縁部6
bによって受光部2に位置決めされる。光学調整器4の
マスク部6aには、丸孔状をした開口面積の等しい2個
の開口5a,5bが設けられており、図1に示すように
、光学調整器4を受光部2に取り付けて位置決めした時
、2個の開口5a,5bは、スリット3と重なり、しか
もスリット3の中心を通りスリット3の長さ方向と垂直
な方向の線C(仮想的な線であって、実際に線が引かれ
ている必要はない。)に関して線対称となるよう、予め
配置されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 shows an optical adjuster 4 and a light receiving section 2 according to an embodiment of the present invention. The light receiving section 2 has a prismatic outer shape, and a slit 3 for receiving light is opened in the front surface. Optical adjuster 4
has a square box shape, and an outer edge portion 6b for positioning is formed on the outer periphery of the mask portion 6a. That is, the inner peripheral dimension of this outer edge part 6b is formed to be equal to the outer peripheral dimension of the light receiving part 2, and when the optical adjuster 4 is attached so as to cover the front part of the light receiving part 2, the optical adjuster 4 will be attached to the outer peripheral dimension. Part 6
b is positioned on the light receiving section 2. The mask portion 6a of the optical adjuster 4 is provided with two circular openings 5a and 5b having the same opening area, and as shown in FIG. 1, the optical adjuster 4 is attached to the light receiving portion 2. When positioned, the two openings 5a and 5b overlap the slit 3, and a line C passing through the center of the slit 3 and perpendicular to the length direction of the slit 3 (this is a hypothetical line, but actually There is no need for a line to be drawn.

【0012】上記光学調整器4を用いて透過型寸法測定
装置の投光部1と受光部2の位置を調整する方法を説明
する。まず、図1に示すようにスリット3と2個の開口
5a,5bを一致させるようにして受光部2の前面に光
学調整器4を確実に取り付け、光学調整器4を取り付け
られた受光部2と投光部1を対向させて配置し、図2(
a)のように投光部1から光学調整器4に投光ビームβ
を照射させる。
A method of adjusting the positions of the light projecting section 1 and the light receiving section 2 of the transmission type dimension measuring apparatus using the optical adjuster 4 will be explained. First, as shown in FIG. 1, the optical adjuster 4 is securely attached to the front surface of the light receiving section 2 by aligning the slit 3 with the two openings 5a and 5b. 2 (
As shown in a), the light beam β is transmitted from the light projector 1 to the optical adjuster 4.
irradiate.

【0013】つぎに、以下のようにして投光ビームβの
光軸αをスリット3の長さ方向で位置決めする。まず、
一方の開口5aだけを例えば指で塞ぎ、他方の開口5b
を遮らないように注意しつつ受光部2の出力をモニター
し、同様に、他方の開口5bだけを例えば指で塞いで受
光部2の出力をモニターし、投光部1を上下に振って投
光ビームβを上下に移動させ、交互に開口5a,5bを
開閉した時の受光部出力が等しくなるように調整する。 この調整が終了すると、投光ビームβの光軸αは、図2
(b)に示すように、スリット3の中心を通ってスリッ
ト3の長さ方向と垂直な方向の線Cの上に位置している
Next, the optical axis α of the projected beam β is positioned in the length direction of the slit 3 in the following manner. first,
Only one opening 5a is closed with a finger, and the other opening 5b is closed.
Monitor the output of the light receiving section 2 while being careful not to block the light, and similarly monitor the output of the light receiving section 2 by covering only the other opening 5b with your finger, and then shake the light projecting section 1 up and down to emit light. The light beam β is moved up and down and adjusted so that the outputs of the light receiving section become equal when the apertures 5a and 5b are alternately opened and closed. When this adjustment is completed, the optical axis α of the projected beam β will be
As shown in (b), it is located on a line C passing through the center of the slit 3 and perpendicular to the length direction of the slit 3.

【0014】こうしてスリット3の長さ方向の調整が終
わると、スリット3の幅方向の調整をする。つまり、投
光部1を左右に振って投光ビームβを左右に移動させ、
受光部2の出力が最大となるように調整する。この調整
が完了すると、投光ビームβの光軸αは、図2(c)に
示すように、2個の開口5a,5bの中央、すなわちス
リット3の中心に位置している。
After the adjustment of the slit 3 in the length direction is completed, the adjustment of the slit 3 in the width direction is performed. In other words, by swinging the light projecting unit 1 left and right, the projecting beam β is moved left and right,
Adjust so that the output of the light receiving section 2 becomes maximum. When this adjustment is completed, the optical axis α of the projected beam β is located at the center of the two apertures 5a and 5b, that is, at the center of the slit 3, as shown in FIG. 2(c).

【0015】このように本発明の方法によれば受光部出
力をモニターしながら、スリット3の長さ方向と幅方向
とで順次調整できるので、調整作業が容易になる。しか
も、スリット3の長さ方向では、受光部出力の最大値を
求めるよりも簡単で確実な、受光部出力を等しくすると
いう調整方法を用いることができる。
As described above, according to the method of the present invention, adjustment can be made sequentially in the length direction and the width direction of the slit 3 while monitoring the output of the light receiving section, thereby facilitating the adjustment work. Furthermore, in the length direction of the slit 3, it is possible to use an adjustment method of equalizing the light receiving section outputs, which is simpler and more reliable than finding the maximum value of the light receiving section outputs.

【0016】図3は本発明の別な実施例の光学調整器1
0を示す斜視図である。これは、しゃもじ状をした可動
遮蔽板7の基部を枢支部8によって光学調整器10に取
り付け、可動遮蔽板7を回動させることによりその先端
の遮蔽部9でいずれかの開口5a,5bを塞ぐことがで
きるようにしたものである。この光学調整器10を用い
れば、調整作業時に指等で開口5a,5bを塞ぐ必要が
なく、可動遮蔽板7で2個の開口5a,5bを交互に開
閉できるので、微調整も容易に行なえる。
FIG. 3 shows an optical adjuster 1 according to another embodiment of the present invention.
FIG. This is done by attaching the base of a rice scoop-shaped movable shielding plate 7 to the optical adjuster 10 via a pivot 8, and by rotating the movable shielding plate 7, a shielding portion 9 at the tip of the movable shielding plate 7 can open either the opening 5a or 5b. It was made so that it could be blocked. By using this optical adjuster 10, there is no need to block the openings 5a and 5b with fingers or the like during adjustment work, and the two openings 5a and 5b can be opened and closed alternately with the movable shielding plate 7, making it easy to make fine adjustments. Ru.

【0017】[0017]

【発明の効果】本発明によれば、両開口を交互に塞いだ
時、受光部出力が等しくなるように投光部もしくは受光
部を動かすことにより投光ビームをスリットの中心を通
る線上に一致させることができ、受光部出力の最大値を
見付ける方法に較べて調整作業を簡単かつ確実にするこ
とができる。また、受光部出力の最大値を見付ける時も
スリットの幅方向のみであるので、従来のように2方向
での最大値を同時に発見する方法に較べて調整作業が容
易になる。すなわち、本発明によれば、投光ビームとス
リット中心の位置合わせを1方向づつ順次行なえ、しか
も1つの方向では、受光部出力の等しい位置を選ぶだけ
の作業でよく、投光ビームの光軸とスリット中心との位
置調整を極めて能率的に、かつ確実に行なうことができ
る。
Effects of the Invention According to the present invention, when both apertures are alternately closed, the light emitting part or the light receiving part is moved so that the output of the light receiving part is equalized, so that the light emitting beam is aligned on a line passing through the center of the slit. This makes the adjustment work easier and more reliable than the method of finding the maximum value of the output of the light receiving section. Furthermore, since the maximum value of the output of the light receiving section is found only in the width direction of the slit, the adjustment work is easier than in the conventional method of finding the maximum value in two directions at the same time. That is, according to the present invention, the projection beam and the slit center can be aligned sequentially in each direction, and in one direction, it is only necessary to select a position where the output of the light receiving section is equal, and the optical axis of the projection beam can be aligned. The position adjustment between the slit center and the slit center can be performed extremely efficiently and reliably.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の一実施例の光学調整器と受光部を示す
斜視図である。
FIG. 1 is a perspective view showing an optical adjuster and a light receiving section according to an embodiment of the present invention.

【図2】(a)(b)(c)は、図1の光学調整器の使
用方法を説明するための斜視図である。
2(a), (b), and (c) are perspective views for explaining how to use the optical adjuster of FIG. 1. FIG.

【図3】本発明の別な実施例の光学調整器を示す斜視図
である。
FIG. 3 is a perspective view showing an optical adjuster according to another embodiment of the present invention.

【図4】透過型の寸法測定装置を示す斜視図である。FIG. 4 is a perspective view showing a transmission type dimension measuring device.

【符号の説明】[Explanation of symbols]

1  投光部 2  受光部 3  スリット 4,10  光学調整器 5a,5b  開口 6a  マスク部 6b  外縁部 1 Light projecting section 2 Light receiving part 3 Slit 4,10 Optical adjuster 5a, 5b Opening 6a Mask part 6b Outer edge

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  投光部から投光ビームを物体に照射し
、この投光ビームを受光部のスリットに入射させると共
にその物体で遮蔽されることにより変化する受光量を受
光部で検知し、物体の寸法を測定する装置において投光
ビームの光軸とスリットの中心とを一致させるための光
学調整器であって、前記投光部から出射される投光ビー
ムを遮断するマスク部と、マスク部にあけられた2つの
開口と、この2つの開口が前記受光部のスリットと一致
するように、かつ両開口の位置がスリットの中心を通る
スリット幅方向の線に関して線対称となるように、マス
ク部を受光部に位置決めする手段とからなる寸法測定装
置の光学調整器。
1. A light projecting section emits a light projection beam onto an object, the projecting beam enters a slit in a light receiving section, and the light receiving section detects the amount of received light that changes as the projecting beam is blocked by the object, An optical adjuster for aligning the optical axis of a projected beam with the center of a slit in an apparatus for measuring the dimensions of an object, the optical adjuster comprising: a mask section for blocking the projected beam emitted from the light projecting section; two openings formed in the section, so that these two openings coincide with the slit of the light receiving section, and so that the positions of both openings are symmetrical with respect to a line in the slit width direction passing through the center of the slit, An optical adjuster for a dimension measuring device comprising a means for positioning a mask part to a light receiving part.
【請求項2】  投光部から出射された投光ビームの光
軸と受光部に開口されたスリットの中心とを一致させる
ための光学調整器の使用方法であって、受光部にマスク
部を取り付けてマスク部の2つの開口をスリットに一致
させると共に、両開口をスリットの中心を通るスリット
幅方向の線に関して線対称となるように配置し、一方の
開口だけを塞いだ時の受光部出力と他方の開口だけを塞
いだ時の受光部出力とが等しくなるように投光部もしく
は受光部を動かし、一方の開口だけを塞いだ時の受光部
出力と他方の開口だけを塞いだ時の受光部出力とが等し
い状態を保ちながら投光部もしくは受光部を動かし、受
光部出力が最大となる状態に投光部と受光部を位置調整
する光学調整器の使用方法。
2. A method of using an optical adjuster for aligning the optical axis of a projected beam emitted from a light projecting section with the center of a slit opened in a light receiving section, the method comprising: attaching a mask section to the light receiving section; Output from the light receiving section when installed, aligning the two openings of the mask section with the slit, arranging both openings so that they are symmetrical with respect to the line in the slit width direction passing through the center of the slit, and blocking only one opening. Move the emitter or light receiver so that the output of the light receiver when only the other aperture is closed is equal to the output of the light receiver when only the other aperture is closed, and the output of the light receiver when only the other aperture is closed. A method of using an optical adjuster in which the light emitter or the light receiver is moved while the output of the light receiver remains equal, and the positions of the light emitter and the light receiver are adjusted so that the output of the light receiver is maximized.
JP2527891A 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof Pending JPH04240506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2527891A JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2527891A JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Publications (1)

Publication Number Publication Date
JPH04240506A true JPH04240506A (en) 1992-08-27

Family

ID=12161556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2527891A Pending JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Country Status (1)

Country Link
JP (1) JPH04240506A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173967A (en) * 2013-03-08 2014-09-22 Seiko Epson Corp Sample inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173967A (en) * 2013-03-08 2014-09-22 Seiko Epson Corp Sample inspection device

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