JPH04240506A - Optical regulator of measuring device of dimension and using method thereof - Google Patents

Optical regulator of measuring device of dimension and using method thereof

Info

Publication number
JPH04240506A
JPH04240506A JP2527891A JP2527891A JPH04240506A JP H04240506 A JPH04240506 A JP H04240506A JP 2527891 A JP2527891 A JP 2527891A JP 2527891 A JP2527891 A JP 2527891A JP H04240506 A JPH04240506 A JP H04240506A
Authority
JP
Japan
Prior art keywords
sensing part
slit
light sensing
light beam
5b
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2527891A
Inventor
Yasumasa Sakai
Hiroaki Takimasa
Tomiyoshi Yoshida
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2527891A priority Critical patent/JPH04240506A/en
Publication of JPH04240506A publication Critical patent/JPH04240506A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to conduct simply an operation of position alignment of the optical axis of a projected light beam emitted from a light projecting part with the center of a slit of a light sensing part in a transmission type device for measuring dimensions.
CONSTITUTION: An optical regulator 4 is fitted to a light sensing part 2, and two openings 5a and 5b having equal opening areas are disposed to be symmetric linearly in respect to a line C passing through the center of a slit 3 and being perpendicular to the direction of the length of the slit 3. Next, a projected light beam β is oscillated vertically, the openings 5a and 5b are closed one by one alternately and thereby regulation is made so that an output of the light sensing part be equal. Moreover, the projected light beam β is oscillated laterally and regulation is made so that the output of the light sensing part be maximum.
COPYRIGHT: (C)1992,JPO&Japio
JP2527891A 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof Pending JPH04240506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2527891A JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2527891A JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Publications (1)

Publication Number Publication Date
JPH04240506A true JPH04240506A (en) 1992-08-27

Family

ID=12161556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2527891A Pending JPH04240506A (en) 1991-01-24 1991-01-24 Optical regulator of measuring device of dimension and using method thereof

Country Status (1)

Country Link
JP (1) JPH04240506A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173967A (en) * 2013-03-08 2014-09-22 Seiko Epson Corp Sample inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014173967A (en) * 2013-03-08 2014-09-22 Seiko Epson Corp Sample inspection device

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