JPS6276536U - - Google Patents
Info
- Publication number
- JPS6276536U JPS6276536U JP16859185U JP16859185U JPS6276536U JP S6276536 U JPS6276536 U JP S6276536U JP 16859185 U JP16859185 U JP 16859185U JP 16859185 U JP16859185 U JP 16859185U JP S6276536 U JPS6276536 U JP S6276536U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- optical system
- electrical signal
- onto
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16859185U JPS6276536U (enExample) | 1985-10-31 | 1985-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16859185U JPS6276536U (enExample) | 1985-10-31 | 1985-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276536U true JPS6276536U (enExample) | 1987-05-16 |
Family
ID=31101608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16859185U Pending JPS6276536U (enExample) | 1985-10-31 | 1985-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276536U (enExample) |
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1985
- 1985-10-31 JP JP16859185U patent/JPS6276536U/ja active Pending